Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8575521 | Monitoring witness structures for temperature control in RTP systems | Paul Janis Timans | 2013-11-05 |
| 8236706 | Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures | Bruce W. Peuse, Yaozhi Hu, Paul Janis Timans, Guangcai Xing, Wilfried Lerch +4 more | 2012-08-07 |
| 7977258 | Method and system for thermally processing a plurality of wafer-shaped objects | Paul Janis Timans, Wilfried Lerch, Juergen Niess, Manfred Falter, Patrick Schmid +6 more | 2011-07-12 |
| 7704898 | Method for the thermal treatment of disk-shaped substrates | Steffen Frigge, Patrick Schmid, Thorsten Hülsmann, Thomas Theiler | 2010-04-27 |
| 7101812 | Method of forming and/or modifying a dielectric film on a semiconductor surface | Ignaz Eisele, Alexandra Ludsteck, Jörg Schulze, Waltraud Dietl, Georg Roters | 2006-09-05 |
| 6830631 | Method for the removing of adsorbed molecules from a chamber | Wilfried Lerch, Jürgen Niess, Thomas Graf | 2004-12-14 |
| 6100149 | Method for rapid thermal processing (RTP) of silicon substrates | Wilfried Lerch, Helmut Sommer | 2000-08-08 |
| 5872889 | Apparatus and method for rapid thermal processing | Guenter Kaltenbrunner, Helmut Sommer | 1999-02-16 |
| 5861609 | Method and apparatus for rapid thermal processing | Guenter Kaltenbrunner, Thomas Knarr | 1999-01-19 |
| 5841110 | Method and apparatus for improved temperature control in rapid thermal processing (RTP) systems | Heinrich Walk, Michael Maurer, Thomas Knarr | 1998-11-24 |
| 5837555 | Apparatus and method for rapid thermal processing | Guenter Kaltenbrunner, Helmut Sommer | 1998-11-17 |
| 5628564 | Method and apparatus for wavevector selective pyrometry in rapid thermal processing systems | Andreas Tillmann, Heinrich Walk | 1997-05-13 |
| 5580830 | Modified reaction chamber and improved gas flushing method in rapid thermal processing apparatus | Helmut Merkle, Andreas Tillmann | 1996-12-03 |
| 5359693 | Method and apparatus for a rapid thermal processing of delicate components | Thomas Knarr, Heinrich Walk | 1994-10-25 |