Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7704898 | Method for the thermal treatment of disk-shaped substrates | Zsolt Nenyei, Patrick Schmid, Thorsten Hülsmann, Thomas Theiler | 2010-04-27 |
| 7151060 | Device and method for thermally treating semiconductor wafers | Georg Roters, Sing-Pin Tay, Yao Zhi Hu, Regina Hayn, Jens-Uwe Sachse +2 more | 2006-12-19 |
| 7094637 | Method for minimizing the vapor deposition of tungsten oxide during the selective side wall oxidation of tungsten-silicon gates | Olaf Storbeck, Wilhelm Kegel, Jens-Uwe Sachse, Michael Stadtmüller, Regina Hayn +2 more | 2006-08-22 |