Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711388 | Substrate holder and a device and a method for treating substrates | Johann Georg Reichart, Günther Kummer, Reinhold Obst, Wilfried Lerch | 2017-07-18 |
| 9252011 | Method for forming a layer on a substrate at low temperatures | Juergen Niess, Wilfried Lerch, Alexander Gschwandtner | 2016-02-02 |
| 7151060 | Device and method for thermally treating semiconductor wafers | Georg Roters, Steffen Frigge, Sing-Pin Tay, Yao Zhi Hu, Regina Hayn +2 more | 2006-12-19 |
| 7094637 | Method for minimizing the vapor deposition of tungsten oxide during the selective side wall oxidation of tungsten-silicon gates | Olaf Storbeck, Jens-Uwe Sachse, Michael Stadtmüller, Regina Hayn, Erwin Schoer +2 more | 2006-08-22 |
| 6706616 | Method for improving thermal process steps | Thomas Schuster | 2004-03-16 |
| 6699747 | Method for increasing the capacitance in a storage trench | Alexander Ruff, Wolfram Karcher, Martin Schrems | 2004-03-02 |