Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711388 | Substrate holder and a device and a method for treating substrates | Wilhelm Kegel, Günther Kummer, Reinhold Obst, Wilfried Lerch | 2017-07-18 |
| 7850819 | Plasma reactor with high productivity | Harald Wanka, Hans-Peter Voelk | 2010-12-14 |
| 7178402 | Pressure measuring device for vacuum systems | Harald Wanka, Hans-Peter Volkelk | 2007-02-20 |