Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048208 | Method and apparatus for depositing chalcogens | Dieter Schmid, Robert Michael Hartung | 2011-11-01 |
| 7850819 | Plasma reactor with high productivity | Harald Wanka, Johann Georg Reichart | 2010-12-14 |