Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8460468 | Device for doping, deposition or oxidation of semiconductor material at low pressure | Alexander Piechulla, Claus Rade | 2013-06-11 |
| 8048208 | Method and apparatus for depositing chalcogens | Dieter Schmid, Hans-Peter Voelk | 2011-11-01 |
| 7618595 | Assembly for purifying toxic gases from production processes | Volker Kinzig, Rolf Hartung | 2009-11-17 |