Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8460468 | Device for doping, deposition or oxidation of semiconductor material at low pressure | Claus Rade, Robert Michael Hartung | 2013-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8460468 | Device for doping, deposition or oxidation of semiconductor material at low pressure | Claus Rade, Robert Michael Hartung | 2013-06-11 |