Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9252011 | Method for forming a layer on a substrate at low temperatures | Wilfried Lerch, Wilhelm Kegel, Alexander Gschwandtner | 2016-02-02 |
| 7977258 | Method and system for thermally processing a plurality of wafer-shaped objects | Zsolt Nenyei, Paul Janis Timans, Wilfried Lerch, Manfred Falter, Patrick Schmid +6 more | 2011-07-12 |