Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8450652 | Apparatus for thermally treating semiconductor substrates | — | 2013-05-28 |
| 7977258 | Method and system for thermally processing a plurality of wafer-shaped objects | Zsolt Nenyei, Paul Janis Timans, Wilfried Lerch, Juergen Niess, Patrick Schmid +6 more | 2011-07-12 |
| 6965093 | Device for thermally treating substrates | — | 2005-11-15 |