Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7151060 | Device and method for thermally treating semiconductor wafers | Georg Roters, Steffen Frigge, Sing-Pin Tay, Yao Zhi Hu, Regina Hayn +2 more | 2006-12-19 |
| 7094637 | Method for minimizing the vapor deposition of tungsten oxide during the selective side wall oxidation of tungsten-silicon gates | Olaf Storbeck, Wilhelm Kegel, Jens-Uwe Sachse, Michael Stadtmüller, Regina Hayn +2 more | 2006-08-22 |