Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8236706 | Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures | Bruce W. Peuse, Yaozhi Hu, Paul Janis Timans, Guangcai Xing, Wilfried Lerch +4 more | 2012-08-07 |
| 7151060 | Device and method for thermally treating semiconductor wafers | Steffen Frigge, Sing-Pin Tay, Yao Zhi Hu, Regina Hayn, Jens-Uwe Sachse +2 more | 2006-12-19 |
| 7144747 | Method for thermally treating a substrate that comprises several layers | Hin Yiu Anthony Chung | 2006-12-05 |
| 7144826 | Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environment | Roland Mader, Helmut Sommer, Genrih Erlikh, Yehuda Pashut | 2006-12-05 |
| 7101812 | Method of forming and/or modifying a dielectric film on a semiconductor surface | Ignaz Eisele, Alexandra Ludsteck, Jörg Schulze, Zsolt Nenyei, Waltraud Dietl | 2006-09-05 |
| 7094637 | Method for minimizing the vapor deposition of tungsten oxide during the selective side wall oxidation of tungsten-silicon gates | Olaf Storbeck, Wilhelm Kegel, Jens-Uwe Sachse, Michael Stadtmüller, Regina Hayn +2 more | 2006-08-22 |
| 5935650 | Method of oxidation of semiconductor wafers in a rapid thermal processing (RTP) system | Wilfried Lerch, Peter Muenzinger, Roland Mader | 1999-08-10 |