Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8236706 | Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures | Bruce W. Peuse, Yaozhi Hu, Paul Janis Timans, Wilfried Lerch, Sing-Pin Tay +4 more | 2012-08-07 |
| 7341907 | Single wafer thermal CVD processes for hemispherical grained silicon and nano-crystalline grain-sized polysilicon | Ming Li, Kevin Cunningham, Sheeba J. Panayil, R. Suryanarayanan Iyer | 2008-03-11 |
| 6450116 | Apparatus for exposing a substrate to plasma radicals | David B. Noble, Ravi Jallepally, Nathan D'Astici, Gary E. Miner, Turgut Sahin +1 more | 2002-09-17 |
| 6410456 | Method and apparatus for insitu vapor generation | Christian M. Gronet, Peter A. Knoot, Gary E. Miner, David R. Lopes, Satheesh Kuppurao | 2002-06-25 |
| 6159866 | Method for insitu vapor generation for forming an oxide on a substrate | Christian M. Gronet, Peter A. Knoot, Gary E. Miner, David R. Lopes, Satheesh Kuppurao | 2000-12-12 |
| 6114258 | Method of oxidizing a substrate in the presence of nitride and oxynitride films | Gary E. Miner, David R. Lopes, Sathees Kuppurao | 2000-09-05 |
| 6037273 | Method and apparatus for insitu vapor generation | Christian M. Gronet, Peter A. Knoot, Gary E. Miner, David R. Lopes, Satheesh Kuppurao | 2000-03-14 |