Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410456 | Method and apparatus for insitu vapor generation | Christian M. Gronet, Gary E. Miner, Guangcai Xing, David R. Lopes, Satheesh Kuppurao | 2002-06-25 |
| 6395643 | Gas manifold for uniform gas distribution and photochemistry | — | 2002-05-28 |
| 6187133 | Gas manifold for uniform gas distribution and photochemistry | — | 2001-02-13 |
| 6179466 | Method and apparatus for measuring substrate temperatures | Bruce W. Peuse, Gary E. Miner, Mark Yam, Aaron Muir Hunter, Jason Mershon | 2001-01-30 |
| 6164816 | Tuning a substrate temperature measurement system | Wolfgang Aderhold, Abhilash J. Mayur | 2000-12-26 |
| 6159866 | Method for insitu vapor generation for forming an oxide on a substrate | Christian M. Gronet, Gary E. Miner, Guangcai Xing, David R. Lopes, Satheesh Kuppurao | 2000-12-12 |
| 6130415 | Low temperature control of rapid thermal processes | — | 2000-10-10 |
| 6037273 | Method and apparatus for insitu vapor generation | Christian M. Gronet, Gary E. Miner, Guangcai Xing, David R. Lopes, Satheesh Kuppurao | 2000-03-14 |