| 11945045 |
Annealing apparatus using two wavelengths of radiation |
Dean Jennings, Haifan Liang, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter +2 more |
2024-04-02 |
$42,223,000 |
| 10857623 |
Annealing apparatus using two wavelengths of radiation |
Dean Jennings, Haifan Liang, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter +2 more |
2020-12-08 |
$52,028,000 |
| 10840100 |
Method of thermal processing structures formed on a substrate |
Paul G. Carey, Aaron Muir Hunter, Dean Jennings, Abhilash J. Mayur, Stephen Moffatt +2 more |
2020-11-17 |
$41,112,000 |
| 10141191 |
Method of thermal processing structures formed on a substrate |
Paul G. Carey, Aaron Muir Hunter, Dean Jennings, Abhilash J. Mayur, Stephen Moffatt +2 more |
2018-11-27 |
$52,277,000 |
| 9839976 |
Annealing apparatus using two wavelengths of radiation |
Dean Jennings, Haifan Liang, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter +2 more |
2017-12-12 |
$38,022,000 |
| 9737959 |
Thermal processing by scanning a laser line beam |
Dean Jennings, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Teritski +1 more |
2017-08-22 |
$17,010,000 |
| 8951348 |
Single-chamber sequential curing of semiconductor wafers |
Krishnan Shrinivasan, Feng Wang, George D. Kamian, Steve Gentile |
2015-02-10 |
|
| 8907247 |
Annealing apparatus using two wavelengths of laser radiation |
Dean Jennings, Haifan Liang, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter +2 more |
2014-12-09 |
$24,395,000 |
| 8890024 |
Annealing apparatus using two wavelengths of continuous wave laser radiation |
Dean Jennings, Haifan Liang, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter +2 more |
2014-11-18 |
$27,822,000 |
| 8829393 |
Scanned laser light source |
Dean Jennings, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Tertitski +1 more |
2014-09-09 |
$30,186,000 |
| 8765618 |
Annealing apparatus using two wavelengths of continuous wave laser radiation |
Dean Jennings, Haifan Liang, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter +2 more |
2014-07-01 |
$14,182,000 |
| 8653408 |
Annealing apparatus using two wavelengths of continuous wave laser radiation |
Dean Jennings, Haifan Liang, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter +2 more |
2014-02-18 |
$22,088,000 |
| 8518838 |
Method of thermal processing structures formed on a substrate |
Paul G. Carey, Aaron Muir Hunter, Dean Jennings, Abhilash J. Mayur, Stephen Moffatt +2 more |
2013-08-27 |
$25,627,000 |
| 8288685 |
Thermal flux processing by scanning a focused line beam |
Dean Jennings, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Tertitski +1 more |
2012-10-16 |
$10,138,000 |
| 8242407 |
Annealing apparatus using two wavelengths of continuous wave laser radiation |
Dean Jennings, Haifan Liang, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter +2 more |
2012-08-14 |
$35,341,000 |
| 8178819 |
Thermal flux processing by scanning a focused line beam |
Dean Jennings, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Tertitski +1 more |
2012-05-15 |
$33,010,000 |
| 8137465 |
Single-chamber sequential curing of semiconductor wafers |
Krishna Shrinivasan, Feng Wang, George D. Kamian, Steve Gentile |
2012-03-20 |
$14,529,000 |
| 7875829 |
Thermal flux processing by scanning a focused line beam |
Dean Jennings, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Tertitski +1 more |
2011-01-25 |
$50,440,000 |
| 7872209 |
Thermal flux processing by scanning a focused line beam |
Dean Jennings, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Tertitski +1 more |
2011-01-18 |
$15,285,000 |
| 7772134 |
Method of annealing using two wavelengths of continuous wave laser radiation |
Dean Jennings, Haifan Liang, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter +2 more |
2010-08-10 |
$7,625,000 |
| 7611976 |
Gate electrode dopant activation method for semiconductor manufacturing |
Yi Ma, Khaled Ahmed, Kevin Cunningham, Robert C. McIntosh, Abhilash J. Mayur +6 more |
2009-11-03 |
$16,291,000 |
| 7595208 |
Method of laser annealing using two wavelengths of radiation |
Dean Jennings, Haifan Liang, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter +2 more |
2009-09-29 |
$29,132,000 |
| 7569463 |
Method of thermal processing structures formed on a substrate |
Ajit Balakrishna, Paul G. Carey, Dean Jennings, Abhilash J. Mayur, Stephen Moffatt +1 more |
2009-08-04 |
$13,023,000 |
| 7279721 |
Dual wavelength thermal flux laser anneal |
Dean Jennings, Haifan Liang, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter +2 more |
2007-10-09 |
$22,463,000 |
| 7262106 |
Absorber layer for DSA processing |
Luc Van Autryve, Chris Bencher, Dean Jennings, Haifan Liang, Abhilash J. Mayur +2 more |
2007-08-28 |
$31,681,000 |
