| 12078547 |
Etalon thermometry for plasma environments |
Samuel C. Howells, Alvaro Garcia, Barry Craver, Tony Jefferson GNANAPRAKASA, Lei Lian |
2024-09-03 |
$44,731,000 |
| 12031322 |
Sag-resistant acoustic board |
Charles G. KRICK, Kimberly Diffenbaugh |
2024-07-09 |
|
| 11945045 |
Annealing apparatus using two wavelengths of radiation |
Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more |
2024-04-02 |
$42,223,000 |
| 11280686 |
Temperature measurement using etalons |
Samuel C. Howells |
2022-03-22 |
$64,102,000 |
| 10857623 |
Annealing apparatus using two wavelengths of radiation |
Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more |
2020-12-08 |
$52,028,000 |
| 10234772 |
Overlay error correction |
Mangesh Ashok BANGAR, Kelly E. Hollar, Abhilash J. Mayur, Huixiong Dai, Jaujiun Chen |
2019-03-19 |
$17,059,000 |
| 10181409 |
Thermal processing apparatus |
Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Jiping Li +1 more |
2019-01-15 |
$61,415,000 |
| 10147623 |
Pyrometry filter for thermal process chamber |
Joseph M. Ranish |
2018-12-04 |
$61,690,000 |
| 10074538 |
Methods for crystallizing a substrate using a plurality of laser pulses and freeze periods |
Aaron Muir Hunter, Stephen Moffatt |
2018-09-11 |
$27,448,000 |
| 9958709 |
Dynamic optical valve for mitigating non-uniform heating in laser processing |
— |
2018-05-01 |
$18,276,000 |
| 9953851 |
Process sheet resistance uniformity improvement using multiple melt laser exposures |
Jiping Li, Aaron Muir Hunter, Kim Vellore, Samuel C. Howells, Stephen Moffatt |
2018-04-24 |
$74,029,000 |
| 9927622 |
Multiple beam combiner for laser processing apparatus |
Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Jiping Li +1 more |
2018-03-27 |
$21,583,000 |
| 9908200 |
Apparatus and method of improving beam shaping and beam homogenization |
Samuel C. Howells, Dean Jennings, Jiping Li, Timothy N. Thomas, Stephen Moffatt |
2018-03-06 |
$32,877,000 |
| 9864280 |
Overlay error correction |
Mangesh Ashok BANGAR, Kelly E. Hollar, Abhilash J. Mayur, Huixiong Dai, Jaujiun Chen |
2018-01-09 |
$16,545,000 |
| 9839976 |
Annealing apparatus using two wavelengths of radiation |
Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more |
2017-12-12 |
$38,022,000 |
| 9786529 |
Pyrometry filter for thermal process chamber |
Joseph M. Ranish |
2017-10-10 |
$63,139,000 |
| 9579750 |
Particle control in laser processing systems |
Aaron Muir Hunter, Mehran Behdjat |
2017-02-28 |
$9,499,000 |
| 9390926 |
Process sheet resistance uniformity improvement using multiple melt laser exposures |
Jiping Li, Aaron Muir Hunter, Kim Vellore, Samuel C. Howells, Stephen Moffatt |
2016-07-12 |
$13,832,000 |
| 9373511 |
Methods for crystallizing a substrate using energy pulses and freeze periods |
Aaron Muir Hunter, Stephen Moffatt |
2016-06-21 |
$17,194,000 |
| 9285595 |
Multiple beam combiner for laser processing apparatus |
Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Jiping Li +1 more |
2016-03-15 |
$10,944,000 |
| 9146337 |
Apparatus for speckle reduction, pulse stretching, and beam homogenization |
Jiping Li, Aaron Muir Hunter, Douglas E. Holmgren, Samuel C. Howells, Theodore P. Moffitt +1 more |
2015-09-29 |
$14,922,000 |
| 8970963 |
Multiple beam combiner for laser processing apparatus |
Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Jiping Li +1 more |
2015-03-03 |
$11,301,000 |
| 8907247 |
Annealing apparatus using two wavelengths of laser radiation |
Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more |
2014-12-09 |
$24,395,000 |
| 8890024 |
Annealing apparatus using two wavelengths of continuous wave laser radiation |
Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more |
2014-11-18 |
$27,822,000 |
| 8829392 |
Apparatus and method of improving beam shaping and beam homogenization |
Samuel C. Howells, Dean Jennings, Jiping Li, Timothy N. Thomas, Stephen Moffatt |
2014-09-09 |
$30,186,000 |
