| 12230521 |
Method for non-contact low substrate temperature measurement |
Leonid M. Tertitski, Matthew D. Scotney-Castle |
2025-02-18 |
| 12134835 |
Quartz susceptor for accurate non-contact temperature measurement |
— |
2024-11-05 |
| 11756816 |
Carrier FOUP and a method of placing a carrier |
Steven Trey Tindel, Alexander Lerner |
2023-09-12 |
| 11637004 |
Alignment module with a cleaning chamber |
Alexander Lerner, Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kevin Moraes +1 more |
2023-04-25 |
| 11538706 |
System and method for aligning a mask with a substrate |
Alexander Lerner, Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kevin Moraes +1 more |
2022-12-27 |
| 11469124 |
Contactless latch and coupling for vacuum wafer transfer cassette |
Shreyas Patil Shanthaveeraswamy, Ribhu Gautam, Kumaresan Nagarajan, Vijay Singh, Andrew J. Constant +1 more |
2022-10-11 |
| 11414740 |
Processing system for forming layers |
Alexander Lerner, Roey Shaviv, Michael P. Karazim, Kevin Moraes, Steven V. Sansoni +4 more |
2022-08-16 |
| 11196360 |
System and method for electrostatically chucking a substrate to a carrier |
Alexander Lerner, Steven Trey Tindel |
2021-12-07 |
| 11183411 |
Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency |
Alexander Lerner, Steven Trey Tindel |
2021-11-23 |
| 11047039 |
Substrate carrier having hard mask |
Alexander Lerner, Ami Sade, Steven V. Sansoni, Andrew J. Constant, Kevin Moraes +4 more |
2021-06-29 |
| 10916464 |
Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency |
Alexander Lerner, Steven Trey Tindel |
2021-02-09 |
| 10109514 |
Visual feedback for process control in RTP chambers |
Dinesh Kanawade, Stephen Moffatt, Aaron Miller, Leonid M. Tertitski, Norman L. Tam +2 more |
2018-10-23 |
| 9959610 |
System and method to detect substrate and/or substrate support misalignment using imaging |
Leonid M. Tertitski, Schubert S. Chu, Shay Assaf, Zhepeng CONG |
2018-05-01 |
| 9953851 |
Process sheet resistance uniformity improvement using multiple melt laser exposures |
Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Samuel C. Howells, Stephen Moffatt |
2018-04-24 |
| 9735034 |
Visual feedback for process control in RTP chambers |
Dinesh Kanawade, Stephen Moffatt, Aaron Miller, Leonid M. Tertitski, Norman L. Tam +2 more |
2017-08-15 |
| 9696097 |
Multi-substrate thermal management apparatus |
Kallol Bera, Andrew J. Constant, Jacob Newman, Jeffrey Blahnik, Jason M. Schaller +3 more |
2017-07-04 |
| 9390926 |
Process sheet resistance uniformity improvement using multiple melt laser exposures |
Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Samuel C. Howells, Stephen Moffatt |
2016-07-12 |
| 7567885 |
Method and system for determining object height |
Harald Herchen, Erica Porras |
2009-07-28 |
| 6598559 |
Temperature controlled chamber |
Qiwei Liang, Erwin Polar |
2003-07-29 |