Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230521 | Method for non-contact low substrate temperature measurement | Leonid M. Tertitski, Matthew D. Scotney-Castle | 2025-02-18 |
| 12134835 | Quartz susceptor for accurate non-contact temperature measurement | — | 2024-11-05 |
| 11756816 | Carrier FOUP and a method of placing a carrier | Steven Trey Tindel, Alexander Lerner | 2023-09-12 |
| 11637004 | Alignment module with a cleaning chamber | Alexander Lerner, Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kevin Moraes +1 more | 2023-04-25 |
| 11538706 | System and method for aligning a mask with a substrate | Alexander Lerner, Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kevin Moraes +1 more | 2022-12-27 |
| 11469124 | Contactless latch and coupling for vacuum wafer transfer cassette | Shreyas Patil Shanthaveeraswamy, Ribhu Gautam, Kumaresan Nagarajan, Vijay Singh, Andrew J. Constant +1 more | 2022-10-11 |
| 11414740 | Processing system for forming layers | Alexander Lerner, Roey Shaviv, Michael P. Karazim, Kevin Moraes, Steven V. Sansoni +4 more | 2022-08-16 |
| 11196360 | System and method for electrostatically chucking a substrate to a carrier | Alexander Lerner, Steven Trey Tindel | 2021-12-07 |
| 11183411 | Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency | Alexander Lerner, Steven Trey Tindel | 2021-11-23 |
| 11047039 | Substrate carrier having hard mask | Alexander Lerner, Ami Sade, Steven V. Sansoni, Andrew J. Constant, Kevin Moraes +4 more | 2021-06-29 |
| 10916464 | Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency | Alexander Lerner, Steven Trey Tindel | 2021-02-09 |
| 10109514 | Visual feedback for process control in RTP chambers | Dinesh Kanawade, Stephen Moffatt, Aaron Miller, Leonid M. Tertitski, Norman L. Tam +2 more | 2018-10-23 |
| 9959610 | System and method to detect substrate and/or substrate support misalignment using imaging | Leonid M. Tertitski, Schubert S. Chu, Shay Assaf, Zhepeng CONG | 2018-05-01 |
| 9953851 | Process sheet resistance uniformity improvement using multiple melt laser exposures | Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Samuel C. Howells, Stephen Moffatt | 2018-04-24 |
| 9735034 | Visual feedback for process control in RTP chambers | Dinesh Kanawade, Stephen Moffatt, Aaron Miller, Leonid M. Tertitski, Norman L. Tam +2 more | 2017-08-15 |
| 9696097 | Multi-substrate thermal management apparatus | Kallol Bera, Andrew J. Constant, Jacob Newman, Jeffrey Blahnik, Jason M. Schaller +3 more | 2017-07-04 |
| 9390926 | Process sheet resistance uniformity improvement using multiple melt laser exposures | Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Samuel C. Howells, Stephen Moffatt | 2016-07-12 |
| 7567885 | Method and system for determining object height | Harald Herchen, Erica Porras | 2009-07-28 |
| 6598559 | Temperature controlled chamber | Qiwei Liang, Erwin Polar | 2003-07-29 |