Issued Patents All Time
Showing 25 most recent of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11490466 | Melt depth determination using infrared interferometric technique in pulsed laser annealing | — | 2022-11-01 |
| 11292079 | Laser noise elimination in transmission thermometry | Aaron Muir Hunter, Thomas Haw | 2022-04-05 |
| 10421151 | Laser noise elimination in transmission thermometry | Aaron Muir Hunter, Thomas Haw | 2019-09-24 |
| 10284455 | Method, terminal and system for cluster terminal to feed back downlink channel information | Qingxiang Yu, Lichang Wu | 2019-05-07 |
| 10219325 | Melt depth determination using infrared interferometric technique in pulsed laser annealing | — | 2019-02-26 |
| 10181409 | Thermal processing apparatus | Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams +1 more | 2019-01-15 |
| 10128144 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jeffrey Tobin +1 more | 2018-11-13 |
| 9953851 | Process sheet resistance uniformity improvement using multiple melt laser exposures | Aaron Muir Hunter, Bruce E. Adams, Kim Vellore, Samuel C. Howells, Stephen Moffatt | 2018-04-24 |
| 9927622 | Multiple beam combiner for laser processing apparatus | Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams +1 more | 2018-03-27 |
| 9908200 | Apparatus and method of improving beam shaping and beam homogenization | Bruce E. Adams, Samuel C. Howells, Dean Jennings, Timothy N. Thomas, Stephen Moffatt | 2018-03-06 |
| 9659809 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jeffrey Tobin +1 more | 2017-05-23 |
| 9508608 | Monitoring laser processing of semiconductors by raman spectroscopy | — | 2016-11-29 |
| 9390926 | Process sheet resistance uniformity improvement using multiple melt laser exposures | Aaron Muir Hunter, Bruce E. Adams, Kim Vellore, Samuel C. Howells, Stephen Moffatt | 2016-07-12 |
| 9385004 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jeffrey Tobin +1 more | 2016-07-05 |
| 9285595 | Multiple beam combiner for laser processing apparatus | Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams +1 more | 2016-03-15 |
| 9146337 | Apparatus for speckle reduction, pulse stretching, and beam homogenization | Aaron Muir Hunter, Bruce E. Adams, Douglas E. Holmgren, Samuel C. Howells, Theodore P. Moffitt +1 more | 2015-09-29 |
| 8970963 | Multiple beam combiner for laser processing apparatus | Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams +1 more | 2015-03-03 |
| 8939760 | Spike anneal residence time reduction in rapid thermal processing chambers | Blake Koelmel, Aaron Muir Hunter, Wolfgang Aderhold | 2015-01-27 |
| 8829392 | Apparatus and method of improving beam shaping and beam homogenization | Bruce E. Adams, Samuel C. Howells, Dean Jennings, Timothy N. Thomas, Stephen Moffatt | 2014-09-09 |
| 8815719 | Defect-free junction formation using octadecaborane self-amorphizing implants | Aaron Muir Hunter, Bruce E. Adams, Theodore P. Moffitt, Stephen Moffatt | 2014-08-26 |
| 8693095 | Method and apparatus for decorrelation of spatially and temporally coherent light | Dean Jennings, Timothy N. Thomas, Stephen Moffatt, Bruce E. Adams, Samuel C. Howells | 2014-04-08 |
| 8674257 | Automatic focus and emissivity measurements for a substrate system | — | 2014-03-18 |
| 8652951 | Selective epitaxial germanium growth on silicon-trench fill and in situ doping | Yi-Chiau Huang, Miao Jin, Bingxi Wood, Errol Antonio C. Sanchez, Yihwan Kim | 2014-02-18 |
| 8588831 | Method and base station for sending information | De Chen | 2013-11-19 |
| 8582963 | Detection of substrate warping during rapid thermal processing | — | 2013-11-12 |