| 11490466 |
Melt depth determination using infrared interferometric technique in pulsed laser annealing |
— |
2022-11-01 |
$32,150,000 |
| 11292079 |
Laser noise elimination in transmission thermometry |
Aaron Muir Hunter, Thomas Haw |
2022-04-05 |
$91,536,000 |
| 10421151 |
Laser noise elimination in transmission thermometry |
Aaron Muir Hunter, Thomas Haw |
2019-09-24 |
$43,471,000 |
| 10284455 |
Method, terminal and system for cluster terminal to feed back downlink channel information |
Qingxiang Yu, Lichang Wu |
2019-05-07 |
|
| 10219325 |
Melt depth determination using infrared interferometric technique in pulsed laser annealing |
— |
2019-02-26 |
$27,960,000 |
| 10181409 |
Thermal processing apparatus |
Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams +1 more |
2019-01-15 |
$61,415,000 |
| 10128144 |
Support cylinder for thermal processing chamber |
Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jeffrey Tobin +1 more |
2018-11-13 |
$24,133,000 |
| 9953851 |
Process sheet resistance uniformity improvement using multiple melt laser exposures |
Aaron Muir Hunter, Bruce E. Adams, Kim Vellore, Samuel C. Howells, Stephen Moffatt |
2018-04-24 |
$74,029,000 |
| 9927622 |
Multiple beam combiner for laser processing apparatus |
Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams +1 more |
2018-03-27 |
$21,583,000 |
| 9908200 |
Apparatus and method of improving beam shaping and beam homogenization |
Bruce E. Adams, Samuel C. Howells, Dean Jennings, Timothy N. Thomas, Stephen Moffatt |
2018-03-06 |
$32,877,000 |
| 9659809 |
Support cylinder for thermal processing chamber |
Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jeffrey Tobin +1 more |
2017-05-23 |
$22,760,000 |
| 9508608 |
Monitoring laser processing of semiconductors by raman spectroscopy |
— |
2016-11-29 |
$13,456,000 |
| 9390926 |
Process sheet resistance uniformity improvement using multiple melt laser exposures |
Aaron Muir Hunter, Bruce E. Adams, Kim Vellore, Samuel C. Howells, Stephen Moffatt |
2016-07-12 |
$13,832,000 |
| 9385004 |
Support cylinder for thermal processing chamber |
Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jeffrey Tobin +1 more |
2016-07-05 |
$10,411,000 |
| 9285595 |
Multiple beam combiner for laser processing apparatus |
Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams +1 more |
2016-03-15 |
$10,944,000 |
| 9146337 |
Apparatus for speckle reduction, pulse stretching, and beam homogenization |
Aaron Muir Hunter, Bruce E. Adams, Douglas E. Holmgren, Samuel C. Howells, Theodore P. Moffitt +1 more |
2015-09-29 |
$14,922,000 |
| 8970963 |
Multiple beam combiner for laser processing apparatus |
Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams +1 more |
2015-03-03 |
$11,301,000 |
| 8939760 |
Spike anneal residence time reduction in rapid thermal processing chambers |
Blake Koelmel, Aaron Muir Hunter, Wolfgang Aderhold |
2015-01-27 |
$30,300,000 |
| 8829392 |
Apparatus and method of improving beam shaping and beam homogenization |
Bruce E. Adams, Samuel C. Howells, Dean Jennings, Timothy N. Thomas, Stephen Moffatt |
2014-09-09 |
$30,186,000 |
| 8815719 |
Defect-free junction formation using octadecaborane self-amorphizing implants |
Aaron Muir Hunter, Bruce E. Adams, Theodore P. Moffitt, Stephen Moffatt |
2014-08-26 |
$21,976,000 |
| 8693095 |
Method and apparatus for decorrelation of spatially and temporally coherent light |
Dean Jennings, Timothy N. Thomas, Stephen Moffatt, Bruce E. Adams, Samuel C. Howells |
2014-04-08 |
$11,783,000 |
| 8674257 |
Automatic focus and emissivity measurements for a substrate system |
— |
2014-03-18 |
$32,089,000 |
| 8652951 |
Selective epitaxial germanium growth on silicon-trench fill and in situ doping |
Yi-Chiau Huang, Miao Jin, Bingxi Wood, Errol Antonio C. Sanchez, Yihwan Kim |
2014-02-18 |
$22,088,000 |
| 8588831 |
Method and base station for sending information |
De Chen |
2013-11-19 |
|
| 8582963 |
Detection of substrate warping during rapid thermal processing |
— |
2013-11-12 |
$7,355,000 |
