Issued Patents All Time
Showing 25 most recent of 173 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12186832 | Pulse train annealing method and apparatus | Stephen Moffatt | 2025-01-07 |
| 12163229 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2024-12-10 |
| 11945045 | Annealing apparatus using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2024-04-02 |
| 11942381 | System for non radial temperature control for rotating substrates | Wolfgang Aderhold, Aaron Muir Hunter | 2024-03-26 |
| 11821088 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2023-11-21 |
| 11662253 | Method and apparatus for measuring temperature | — | 2023-05-30 |
| 11646218 | Sol gel coated support ring | — | 2023-05-09 |
| 11495479 | Light pipe window structure for thermal chamber applications and processes | Aaron Muir Hunter, Anzhong Chang | 2022-11-08 |
| 11462396 | Lamp cross-section for reduced coil heating | — | 2022-10-04 |
| 11393703 | Apparatus and method for controlling a flow process material to a deposition chamber | Alexander Lerner, Roey Shaviv, Phillip Stout, Prashanth Kothnur, Satish Radhakrishnan | 2022-07-19 |
| 11337277 | Circular lamp arrays | — | 2022-05-17 |
| 11162845 | Method and apparatus for measuring temperature | — | 2021-11-02 |
| 11133173 | Simplified lamp design | — | 2021-09-28 |
| 11040415 | Pulse train annealing method and apparatus | Stephen Moffatt | 2021-06-22 |
| 11021795 | Multi zone spot heating in epi | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2021-06-01 |
| 10872790 | Optical system | — | 2020-12-22 |
| 10857623 | Annealing apparatus using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2020-12-08 |
| 10820379 | Lamp base adapter design for baseless lamps | Aaron Miller, Oleg V. Serebryanov | 2020-10-27 |
| 10741457 | System for non radial temperature control for rotating substrates | Wolfgang Aderhold, Aaron Muir Hunter | 2020-08-11 |
| 10734257 | Direct current lamp driver for substrate processing | Oleg V. Serebryanov, Alexander Goldin | 2020-08-04 |
| 10727093 | Light pipe window structure for low pressure thermal processes | Paul Brillhart, Aaron Muir Hunter, Edric Tong, James Francis Mack, Kin Pong Lo +3 more | 2020-07-28 |
| 10699922 | Light pipe arrays for thermal chamber applications and thermal processes | Aaron Muir Hunter | 2020-06-30 |
| 10672641 | Sol gel coated support ring | — | 2020-06-02 |
| 10665484 | Support ring with encapsulated light barrier | — | 2020-05-26 |
| 10661223 | Anneal chamber with getter | — | 2020-05-26 |