| 12438011 |
Apparatus and method for controlling a flow process material to a deposition chamber |
Alexander Lerner, Roey Shaviv, Phillip Stout, Prashanth Kothnur, Satish Radhakrishnan |
2025-10-07 |
|
| 12186832 |
Pulse train annealing method and apparatus |
Stephen Moffatt |
2025-01-07 |
|
| 12163229 |
Multi zone spot heating in EPI |
Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more |
2024-12-10 |
$69,596,000 |
| 11945045 |
Annealing apparatus using two wavelengths of radiation |
Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more |
2024-04-02 |
$42,223,000 |
| 11942381 |
System for non radial temperature control for rotating substrates |
Wolfgang Aderhold, Aaron Muir Hunter |
2024-03-26 |
$55,219,000 |
| 11821088 |
Multi zone spot heating in EPI |
Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more |
2023-11-21 |
$39,416,000 |
| 11662253 |
Method and apparatus for measuring temperature |
— |
2023-05-30 |
$32,229,000 |
| 11646218 |
Sol gel coated support ring |
— |
2023-05-09 |
$42,400,000 |
| 11495479 |
Light pipe window structure for thermal chamber applications and processes |
Aaron Muir Hunter, Anzhong Chang |
2022-11-08 |
$47,551,000 |
| 11462396 |
Lamp cross-section for reduced coil heating |
— |
2022-10-04 |
$41,370,000 |
| 11393703 |
Apparatus and method for controlling a flow process material to a deposition chamber |
Alexander Lerner, Roey Shaviv, Phillip Stout, Prashanth Kothnur, Satish Radhakrishnan |
2022-07-19 |
$63,937,000 |
| 11337277 |
Circular lamp arrays |
— |
2022-05-17 |
$39,228,000 |
| 11162845 |
Method and apparatus for measuring temperature |
— |
2021-11-02 |
$95,673,000 |
| 11133173 |
Simplified lamp design |
— |
2021-09-28 |
$64,178,000 |
| 11040415 |
Pulse train annealing method and apparatus |
Stephen Moffatt |
2021-06-22 |
$66,836,000 |
| 11021795 |
Multi zone spot heating in epi |
Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more |
2021-06-01 |
$74,932,000 |
| 10872790 |
Optical system |
— |
2020-12-22 |
$92,387,000 |
| 10857623 |
Annealing apparatus using two wavelengths of radiation |
Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more |
2020-12-08 |
$52,028,000 |
| 10820379 |
Lamp base adapter design for baseless lamps |
Aaron Miller, Oleg V. Serebryanov |
2020-10-27 |
$26,711,000 |
| 10741457 |
System for non radial temperature control for rotating substrates |
Wolfgang Aderhold, Aaron Muir Hunter |
2020-08-11 |
$71,596,000 |
| 10734257 |
Direct current lamp driver for substrate processing |
Oleg V. Serebryanov, Alexander Goldin |
2020-08-04 |
$43,243,000 |
| 10727093 |
Light pipe window structure for low pressure thermal processes |
Paul Brillhart, Aaron Muir Hunter, Edric Tong, James Francis Mack, Kin Pong Lo +3 more |
2020-07-28 |
$35,855,000 |
| 10699922 |
Light pipe arrays for thermal chamber applications and thermal processes |
Aaron Muir Hunter |
2020-06-30 |
$26,020,000 |
| 10672641 |
Sol gel coated support ring |
— |
2020-06-02 |
$65,790,000 |
| 10665484 |
Support ring with encapsulated light barrier |
— |
2020-05-26 |
$28,096,000 |
