Light pipe window structure for low pressure thermal processes

Assignee

• Applied Materials

Inventors

• Paul Brillhart (59 patents)
• Joseph M. Ranish (174 patents)
• Aaron Muir Hunter (117 patents)
• Edric Tong (26 patents)
• James Francis Mack (24 patents)
• Kin Pong Lo (24 patents)
• Errol Antonio C. Sanchez (98 patents)
• Zhiyuan Ye (82 patents)
• Anzhong Chang (33 patents)

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