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Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal |
Lara Hawrylchak, Errol C. Sanchez, Schubert S. Chu, Tushar Mandrekar |
2021-06-29 |
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Wei Liu, Theresa Kramer Guarini, Linlin Wang, Malcolm J. Bevan, Johanes S. Swenberg +4 more |
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Thermal processing susceptor |
Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more |
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Light pipe window structure for low pressure thermal processes |
Paul Brillhart, Joseph M. Ranish, Aaron Muir Hunter, Edric Tong, James Francis Mack +3 more |
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Upper dome with injection assembly |
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| D858192 |
Gas distribution plate |
— |
2019-09-03 |
| 10306708 |
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Thermal processing susceptor |
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Upper dome with injection assembly |
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Absorbing reflector for semiconductor processing chamber |
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| 9735002 |
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| 9109466 |
Diffuser with backward facing step having varying step height |
John K. Eaton |
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| 8313578 |
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| 7655571 |
Integrated method and apparatus for efficient removal of halogen residues from etched substrates |
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