Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400904 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2025-08-26 |
| 12266560 | Film thickness uniformity improvement using edge ring and bias electrode geometry | Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang, Malcolm J. Bevan +2 more | 2025-04-01 |
| 12125698 | Integrated epitaxy and preclean system | Lara Hawrylchak, Schubert S. Chu, Tushar Mandrekar, Errol C. Sanchez | 2024-10-22 |
| D1034491 | Edge ring | Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang, Malcolm J. Bevan +2 more | 2024-07-09 |
| 11927482 | Methods for calibrating an optical emission spectrometer | Lara Hawrylchak, Malcolm J. Bevan, Theresa Kramer Guarini, Wei Liu, Bernard L. Hwang | 2024-03-12 |
| 11848226 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2023-12-19 |
| 11380575 | Film thickness uniformity improvement using edge ring and bias electrode geometry | Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang, Malcolm J. Bevan +2 more | 2022-07-05 |
| 11164737 | Integrated epitaxy and preclean system | Lara Hawrylchak, Schubert S. Chu, Tushar Mandrekar, Errol C. Sanchez | 2021-11-02 |
| 11049719 | Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal | Lara Hawrylchak, Errol C. Sanchez, Schubert S. Chu, Tushar Mandrekar | 2021-06-29 |
| 10971357 | Thin film treatment process | Wei Liu, Theresa Kramer Guarini, Linlin Wang, Malcolm J. Bevan, Johanes S. Swenberg +4 more | 2021-04-06 |
| 10930543 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2021-02-23 |
| 10727093 | Light pipe window structure for low pressure thermal processes | Paul Brillhart, Joseph M. Ranish, Aaron Muir Hunter, Edric Tong, James Francis Mack +3 more | 2020-07-28 |
| 10458040 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, James Francis Mack, Zhiyuan Ye +5 more | 2019-10-29 |
| D858192 | Gas distribution plate | — | 2019-09-03 |
| 10306708 | Absorbing reflector for semiconductor processing chamber | Paul Brillhart, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield, Joseph M. Ranish +6 more | 2019-05-28 |
| 10269614 | Susceptor design to reduce edge thermal peak | Schubert S. Chu, Kartik Shah, Anhthu Ngo, Karthik Ramanathan, Nitin Pathak +8 more | 2019-04-23 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2018-08-28 |
| 9845550 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, James Francis Mack, Zhiyuan Ye +5 more | 2017-12-19 |
| 9832816 | Absorbing reflector for semiconductor processing chamber | Paul Brillhart, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield, Joseph M. Ranish +6 more | 2017-11-28 |
| 9735002 | Integrated apparatus for efficient removal of halogen residues from etched substrates | Mark Kawaguchi, Brett Christian Hoogensen, Sandy M. Wen, Steven H. Kim | 2017-08-15 |
| 9109466 | Diffuser with backward facing step having varying step height | John K. Eaton | 2015-08-18 |
| 8313578 | Etching chamber having flow equalizer and lower liner | James D. Carducci, Kallol Bera, Michael Kutney, Matthew L. Miller | 2012-11-20 |
| 7655571 | Integrated method and apparatus for efficient removal of halogen residues from etched substrates | Mark Kawaguchi, Brett Christian Hoogensen, Sandy M. Wen, Steven M. Kim | 2010-02-02 |