Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266560 | Film thickness uniformity improvement using edge ring and bias electrode geometry | Kin Pong Lo, Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Malcolm J. Bevan +2 more | 2025-04-01 |
| D1034491 | Edge ring | Kin Pong Lo, Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Malcolm J. Bevan +2 more | 2024-07-09 |
| 12009178 | Ceramic coated quartz lid for processing chamber | — | 2024-06-11 |
| 11927482 | Methods for calibrating an optical emission spectrometer | Kin Pong Lo, Lara Hawrylchak, Malcolm J. Bevan, Theresa Kramer Guarini, Wei Liu | 2024-03-12 |
| 11581408 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Canfeng Lai, Jeffrey Tobin +2 more | 2023-02-14 |
| 11521830 | Ceramic coated quartz lid for processing chamber | — | 2022-12-06 |
| 11380575 | Film thickness uniformity improvement using edge ring and bias electrode geometry | Kin Pong Lo, Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Malcolm J. Bevan +2 more | 2022-07-05 |
| 11127620 | Electrostatic chuck for high temperature processing chamber | — | 2021-09-21 |
| 11017984 | Ceramic coated quartz lid for processing chamber | — | 2021-05-25 |
| 10971357 | Thin film treatment process | Wei Liu, Theresa Kramer Guarini, Linlin Wang, Malcolm J. Bevan, Johanes S. Swenberg +4 more | 2021-04-06 |
| 10950698 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Canfeng Lai, Jeffrey Tobin +2 more | 2021-03-16 |
| 10290504 | Plasma treating a process chamber | Wei Liu, Theresa Kramer Guarini, Huy Q. Nguyen, Malcolm J. Bevan, Houda Graoui +3 more | 2019-05-14 |
| 10049881 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Ken Kaung Lai, Jeffrey Tobin +2 more | 2018-08-14 |
| 9831091 | Plasma treating a process chamber | Wei Liu, Theresa Kramer Guarini, Huy Q. Nguyen, Malcolm J. Bevan, Houda Graoui +3 more | 2017-11-28 |
| 9312154 | CVD apparatus for improved film thickness non-uniformity and particle performance | Binh Tran, Anqing Cui, Son T. Nguyen, Anh N. Nguyen, Sean M. Seutter +1 more | 2016-04-12 |
| 9117867 | Electrostatic chuck assembly | Jose Antonio Marin, Son T. Nguyen | 2015-08-25 |
| 9048190 | Methods and apparatus for processing substrates using an ion shield | Jeffrey Tobin, Canfeng Lai, Lara Hawrylchak, Wei Liu, Johanes F. Swenberg | 2015-06-02 |