Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11885021 | Gas supply member with baffle | Kartik Shah, Vishwas Kumar Pandey, Kailash Pradhan, Sairaju Tallavarjula, Rene George +2 more | 2024-01-30 |
| 11581408 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Lara Hawrylchak, Canfeng Lai, Bernard L. Hwang, Jeffrey Tobin +2 more | 2023-02-14 |
| 11124878 | Gas supply member with baffle | Kartik Shah, Vishwas Kumar Pandey, Kailash Pradhan, Sairaju Tallavarjula, Rene George +2 more | 2021-09-21 |
| 10950698 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Lara Hawrylchak, Canfeng Lai, Bernard L. Hwang, Jeffrey Tobin +2 more | 2021-03-16 |
| 10049881 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Lara Hawrylchak, Ken Kaung Lai, Bernard L. Hwang, Jeffrey Tobin +2 more | 2018-08-14 |
| 8999106 | Apparatus and method for controlling edge performance in an inductively coupled plasma chamber | Wei Liu, Johanes F. Swenberg, Hanh Nguyen, Son T. Nguyen, Philip A. Bottini +1 more | 2015-04-07 |
| 8137463 | Dual zone gas injection nozzle | Wei Liu, Johanes S. Swenberg, Hanh Nguyen, Son T. Nguyen, Philip A. Bottini | 2012-03-20 |
| 8062472 | Method of correcting baseline skew by a novel motorized source coil assembly | Wei Liu, Johanes F. Swenberg, Hanh Nguyen, Son T. Nguyen, Philip A. Bottini | 2011-11-22 |