Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for selective nitridation process

Method and apparatus for selective nitridation process

US Patent 10950698 · Granted Mar 16, 2021

Estimated economic value: $56,717,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods for calibrating an optical emission spectrometer2025
Methods for calibrating an optical emission spectrometer2025
Methods for calibrating an optical emission spectrometer2025
Growth of thin oxide layer with silicon nitride and conversion2025
Showerhead design to control stray deposition2025
Semiconductor processing chambers and methods for deposition and etch2025
Electronic devices having glass layers with scratch resistant coatings2025
Systems and methods for redeeming rewards for cash at an ATM2025
Process chamber process kit with protective coating2025
Process chamber process kit with protective coating2025
Methods of selective oxidation on rapid thermal processing (RTP) chamber with ac2025
Methods of selective oxidation on rapid thermal processing (RTP) chamber with ac2025