Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11885021 | Gas supply member with baffle | Kartik Shah, Vishwas Kumar Pandey, Kailash Pradhan, Rene George, Eric Kihara Shono +2 more | 2024-01-30 |
| 11615944 | Remote plasma oxidation chamber | Christopher S. Olsen, Eric Kihara Shono, Lara Hawrylchak, Agus Sofian Tjandra, Chaitanya A. PRASAD | 2023-03-28 |
| 11529592 | Gas injector with baffle | Vishwas Kumar Pandey, Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen +4 more | 2022-12-20 |
| 11124878 | Gas supply member with baffle | Kartik Shah, Vishwas Kumar Pandey, Kailash Pradhan, Rene George, Eric Kihara Shono +2 more | 2021-09-21 |
| 11077410 | Gas injector with baffle | Vishwas Kumar Pandey, Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen +4 more | 2021-08-03 |
| 10892147 | Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers | Kailash Pradhan, Huy Q. Nguyen, Jian Li | 2021-01-12 |
| 9865438 | Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers | Kailash Pradhan, Huy Q. Nguyen, Jian Li | 2018-01-09 |
| 9558982 | Minimal contact edge ring for rapid thermal processing | Heng Pan, Kevin Joseph Bautista, Jeffrey Tobin | 2017-01-31 |
| 9403251 | Minimal contact edge ring for rapid thermal processing | Kevin Joseph Bautista, Jeffrey Tobin | 2016-08-02 |
| 8101906 | Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers | Kailash Pradhan, Huy Q. Nguyen, Jian Li | 2012-01-24 |
| 7813895 | Methods for plasma matching between different chambers and plasma stability monitoring and control | Aaron Muir Hunter, Joseph M. Ranish, Johanes F. Swenberg, Robert Haney | 2010-10-12 |
| 6803297 | Optimal spike anneal ambient | Dean Jennings, Randhir P. S. Thakur | 2004-10-12 |