Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7813895 | Methods for plasma matching between different chambers and plasma stability monitoring and control | Sairaju Tallavarjula, Aaron Muir Hunter, Joseph M. Ranish, Johanes F. Swenberg | 2010-10-12 | $9,610,000 |
| 6395363 | Sloped substrate support | David S. Ballance, Benjamin Bierman, David W. LaCourt | 2002-05-28 | $75,308,000 |