Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1023987 | Chamber inlet | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Taewan Kim +1 more | 2024-04-23 |
| 11732355 | Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber | Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Tobin Kaufman-Osborn +2 more | 2023-08-22 |
| 11615944 | Remote plasma oxidation chamber | Christopher S. Olsen, Eric Kihara Shono, Lara Hawrylchak, Chaitanya A. PRASAD, Sairaju Tallavarjula | 2023-03-28 |
| 11501945 | Side inject designs for improved radical concentrations | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Taewan Kim +1 more | 2022-11-15 |
| 11501954 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Hansel LO, Eric Kihara Shono +1 more | 2022-11-15 |
| 11268193 | Gas injection apparatus with heating channels | Lara Hawrylchak, Emre Cuvalci | 2022-03-08 |
| 11091835 | Side inject nozzle design for processing chamber | Martin John Ripley | 2021-08-17 |
| D924825 | Chamber inlet | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Taewan Kim +1 more | 2021-07-13 |
| 11049696 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Hansel LO, Eric Kihara Shono +1 more | 2021-06-29 |
| 10847337 | Side inject designs for improved radical concentrations | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Taewan Kim +1 more | 2020-11-24 |
| 10714333 | Apparatus and method for selective oxidation at lower temperature using remote plasma source | Heng Pan, Matthew S. Rogers, Christopher S. Olsen | 2020-07-14 |
| 10689757 | Gas injection apparatus with heating channels | Lara Hawrylchak, Emre Cuvalci | 2020-06-23 |
| 10636626 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Hansel LO, Eric Kihara Shono +1 more | 2020-04-28 |
| 10600641 | Silicon germanium selective oxidation process | — | 2020-03-24 |
| 10260149 | Side inject nozzle design for processing chamber | Martin John Ripley | 2019-04-16 |
| 10020186 | Silicon germanium selective oxidation process | — | 2018-07-10 |
| 9869017 | H2/O2 side inject to improve process uniformity for low temperature oxidation process | Christopher S. Olsen, Emre Cuvalci, Lara Hawrylchak | 2018-01-16 |
| 9514968 | Methods and apparatus for selective oxidation of a substrate | Christopher S. Olsen, Johanes S. Swenberg, Lara Hawrylchak | 2016-12-06 |
| 9123758 | Gas injection apparatus and substrate process chamber incorporating same | Kalyanjit Ghosh, Christopher S. Olsen, Umesh M. Kelkar | 2015-09-01 |
| 8993458 | Methods and apparatus for selective oxidation of a substrate | Christopher S. Olsen, Johanes F. Swenberg, Lara Hawrylchak | 2015-03-31 |
| 8888916 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Robert Navasca, Mehran Behdjat +3 more | 2014-11-18 |
| 8608853 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Robert Navasca, Mehran Behdjat +3 more | 2013-12-17 |
| 8492292 | Methods of forming oxide layers on substrates | Yoshitaka Yokota, Christopher S. Olsen, Yonah Cho, Matthew S. Rogers | 2013-07-23 |
| 8435906 | Methods for forming conformal oxide layers on semiconductor devices | Christopher S. Olsen, Johanes F. Swenberg, Yoshitaka Yokota | 2013-05-07 |
| 8056500 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Robert Navasca, Mehran Behdjat +3 more | 2011-11-15 |