| D1023987 |
Chamber inlet |
Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Taewan Kim +1 more |
2024-04-23 |
|
| 11732355 |
Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber |
Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Tobin Kaufman-Osborn +2 more |
2023-08-22 |
$40,609,000 |
| 11615944 |
Remote plasma oxidation chamber |
Christopher S. Olsen, Eric Kihara Shono, Lara Hawrylchak, Chaitanya A. PRASAD, Sairaju Tallavarjula |
2023-03-28 |
$69,791,000 |
| 11501945 |
Side inject designs for improved radical concentrations |
Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Taewan Kim +1 more |
2022-11-15 |
$47,599,000 |
| 11501954 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Hansel LO, Eric Kihara Shono +1 more |
2022-11-15 |
$47,599,000 |
| 11268193 |
Gas injection apparatus with heating channels |
Lara Hawrylchak, Emre Cuvalci |
2022-03-08 |
$69,139,000 |
| 11091835 |
Side inject nozzle design for processing chamber |
Martin John Ripley |
2021-08-17 |
$63,158,000 |
| D924825 |
Chamber inlet |
Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Taewan Kim +1 more |
2021-07-13 |
|
| 11049696 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Hansel LO, Eric Kihara Shono +1 more |
2021-06-29 |
$47,858,000 |
| 10847337 |
Side inject designs for improved radical concentrations |
Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Taewan Kim +1 more |
2020-11-24 |
$38,395,000 |
| 10714333 |
Apparatus and method for selective oxidation at lower temperature using remote plasma source |
Heng Pan, Matthew S. Rogers, Christopher S. Olsen |
2020-07-14 |
$28,056,000 |
| 10689757 |
Gas injection apparatus with heating channels |
Lara Hawrylchak, Emre Cuvalci |
2020-06-23 |
$29,749,000 |
| 10636626 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Hansel LO, Eric Kihara Shono +1 more |
2020-04-28 |
$15,875,000 |
| 10600641 |
Silicon germanium selective oxidation process |
— |
2020-03-24 |
$19,108,000 |
| 10260149 |
Side inject nozzle design for processing chamber |
Martin John Ripley |
2019-04-16 |
$29,421,000 |
| 10020186 |
Silicon germanium selective oxidation process |
— |
2018-07-10 |
$35,896,000 |
| 9869017 |
H2/O2 side inject to improve process uniformity for low temperature oxidation process |
Christopher S. Olsen, Emre Cuvalci, Lara Hawrylchak |
2018-01-16 |
$25,242,000 |
| 9514968 |
Methods and apparatus for selective oxidation of a substrate |
Christopher S. Olsen, Johanes S. Swenberg, Lara Hawrylchak |
2016-12-06 |
$23,225,000 |
| 9123758 |
Gas injection apparatus and substrate process chamber incorporating same |
Kalyanjit Ghosh, Christopher S. Olsen, Umesh M. Kelkar |
2015-09-01 |
$10,783,000 |
| 8993458 |
Methods and apparatus for selective oxidation of a substrate |
Christopher S. Olsen, Johanes F. Swenberg, Lara Hawrylchak |
2015-03-31 |
$7,138,000 |
| 8888916 |
Thermal reactor with improved gas flow distribution |
Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Robert Navasca, Mehran Behdjat +3 more |
2014-11-18 |
$27,822,000 |
| 8608853 |
Thermal reactor with improved gas flow distribution |
Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Robert Navasca, Mehran Behdjat +3 more |
2013-12-17 |
$19,424,000 |
| 8492292 |
Methods of forming oxide layers on substrates |
Yoshitaka Yokota, Christopher S. Olsen, Yonah Cho, Matthew S. Rogers |
2013-07-23 |
$9,121,000 |
| 8435906 |
Methods for forming conformal oxide layers on semiconductor devices |
Christopher S. Olsen, Johanes F. Swenberg, Yoshitaka Yokota |
2013-05-07 |
$10,477,000 |
| 8056500 |
Thermal reactor with improved gas flow distribution |
Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Robert Navasca, Mehran Behdjat +3 more |
2011-11-15 |
$11,864,000 |
