Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11274368 | Apparatus for selective gas injection and extraction | — | 2022-03-15 |
| 11091835 | Side inject nozzle design for processing chamber | Agus Sofian Tjandra | 2021-08-17 |
| 10260149 | Side inject nozzle design for processing chamber | Agus Sofian Tjandra | 2019-04-16 |
| 10174422 | Apparatus for selective gas injection and extraction | — | 2019-01-08 |
| 9117661 | Method of improving oxide growth rate of selective oxidation processes | Yoshitaka Yokota, Norman L. Tam, Balasubramanian Ramachandran | 2015-08-25 |
| 8980767 | Methods and apparatus for processing a substrate | Matthew S. Rogers | 2015-03-17 |
| 8546271 | Method of improving oxide growth rate of selective oxidation processes | Yoshitaka Yokota, Norman L. Tam, Balasubramanian Ramachandran | 2013-10-01 |
| 8298372 | Quartz window having gas feed and processing equipment incorporating same | Tae Jung Kim | 2012-10-30 |
| 7951728 | Method of improving oxide growth rate of selective oxidation processes | Yoshitaka Yokota, Norman L. Tam, Balasubramanian Ramachandran | 2011-05-31 |
| 7922863 | Apparatus for integrated gas and radiation delivery | Sean M. Seutter | 2011-04-12 |