Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087555 | Method and system for cleaning a process chamber | Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja | 2024-09-10 |
| 12044704 | Method of centering probe head in mounting frame | Douglas S. Ondricek, Paul Hsiao | 2024-07-23 |
| 11952660 | Semiconductor processing chambers and methods for cleaning the same | Nitin Pathak, Yuxing Zhang, Tuan Nguyen, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez | 2024-04-09 |
| 11532462 | Method and system for cleaning a process chamber | Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja | 2022-12-20 |
| 11512391 | Process kit for a high throughput processing chamber | Mayur Govind Kulkarni, Sanjeev Baluja, Kien N. Chuc, Sungjin Kim, Yanjie Wang | 2022-11-29 |
| 11508611 | Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films | Mayur Govind Kulkarni, Sanjeev Baluja, Praket P. Jha, Krishna Nittala | 2022-11-22 |
| 11078568 | Pumping apparatus and method for substrate processing chambers | David Blahnik, Amit Kumar BANSAL, Tuan Nguyen | 2021-08-03 |
| 11047043 | Chamber liner for high temperature processing | Sanjeev Baluja, Ren-Guan Duan | 2021-06-29 |
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2021-06-08 |
| 10907252 | Horizontal heat choke faceplate design | Yuxing Zhang, Daniel HWUNG, Ashutosh Agarwal, Kaushik Alayavalli | 2021-02-02 |
| 10889894 | Faceplate with embedded heater | Daniel HWUNG, Yuxing Zhang, Kaushik Alayavalli, Amit Kumar BANSAL | 2021-01-12 |
| 10724138 | Process kit for a high throughput processing chamber | Mayur Govind Kulkarni, Sanjeev Baluja, Kien N. Chuc, Sungjin Kim, Yanjie Wang | 2020-07-28 |
| 10636628 | Method for cleaning a process chamber | Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja | 2020-04-28 |
| 10636684 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2020-04-28 |
| 10612135 | Method and system for high temperature clean | Sanjeev Baluja, Ren-Guan Duan, Mayur Govind Kulkarni, Gregory Siu, Praket P. Jha +4 more | 2020-04-07 |
| 10600624 | System and method for substrate processing chambers | Sanjeev Baluja, Mayur Govind Kulkarni, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou +9 more | 2020-03-24 |
| 10490436 | Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films | Mayur Govind Kulkarni, Sanjeev Baluja, Praket P. Jha, Krishna Nittala | 2019-11-26 |
| 10480068 | Chamber liner for high temperature processing | Sanjeev Baluja, Ren-Guan Duan | 2019-11-19 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2019-09-03 |
| 10312076 | Application of bottom purge to increase clean efficiency | Sanjeev Baluja, Mayur Govind Kulkarni | 2019-06-04 |
| 10232324 | Gas mixing apparatus | Kartik Shah, Scott McClelland | 2019-03-19 |
| 10217650 | Methods and apparatus for substrate edge cleaning | James M. Holden, Song-Moon Suh, Todd Egan, Leon Volfovski, Michael R. Rice +1 more | 2019-02-26 |
| 10113231 | Process kit including flow isolator ring | Dale R. DuBois, Kien N. Chuc, Mayur Govind Kulkarni, Sanjeev Baluja, Yanjie Wang +1 more | 2018-10-30 |
| 10017855 | Process kit for a high throughput processing chamber | Mayur Govind Kulkarni, Sanjeev Baluja, Kien N. Chuc, Sungjin Kim, Yanjie Wang | 2018-07-10 |
| 9443714 | Methods and apparatus for substrate edge cleaning | James M. Holden, Song-Moon Suh, Todd Egan, Leon Volfovski, Michael R. Rice +1 more | 2016-09-13 |