Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10907252 | Horizontal heat choke faceplate design | Yuxing Zhang, Ashutosh Agarwal, Kaushik Alayavalli, Kalyanjit Ghosh | 2021-02-02 |
| 10889894 | Faceplate with embedded heater | Yuxing Zhang, Kalyanjit Ghosh, Kaushik Alayavalli, Amit Kumar BANSAL | 2021-01-12 |
| 10600624 | System and method for substrate processing chambers | Kalyanjit Ghosh, Sanjeev Baluja, Mayur Govind Kulkarni, Shailendra Srivastava, Tejas Ulavi +9 more | 2020-03-24 |