| 12338530 |
Shaped showerhead for edge plasma modulation |
Saketh Pemmasani, Daemian Raj Benjamin Raj, Xiaopu Li, Akshay Dhanakshirur, Madhu Santosh Kumar Mutyala +2 more |
2025-06-24 |
| 12119209 |
Dynamic processing chamber baffle |
Udit S. Kotagi |
2024-10-15 |
| 12040210 |
Multi-pressure bipolar electrostatic chucking |
Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Paul Brillhart, Akshay Gunaji +6 more |
2024-07-16 |
| 12020907 |
Faceplate with localized flow control |
Arun Thottappayil, Junghoon Sun, Jun Tae Choi, Hang Yu |
2024-06-25 |
| 11929278 |
Low impedance current path for edge non-uniformity tuning |
Madhu Santosh Kumar Mutyala, Saketh Pemmasani, Akshay Dhanakshirur, Hang Yu, Deenesh Padhi |
2024-03-12 |
| 11869795 |
Mesa height modulation for thickness correction |
Saketh Pemmasani, Akshay Dhanakshirur, Madhu Santosh Kumar Mutyala, Hang Yu, Deenesh Padhi |
2024-01-09 |
| 11512391 |
Process kit for a high throughput processing chamber |
Kalyanjit Ghosh, Sanjeev Baluja, Kien N. Chuc, Sungjin Kim, Yanjie Wang |
2022-11-29 |
| 11508611 |
Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films |
Kalyanjit Ghosh, Sanjeev Baluja, Praket P. Jha, Krishna Nittala |
2022-11-22 |
| 10724138 |
Process kit for a high throughput processing chamber |
Kalyanjit Ghosh, Sanjeev Baluja, Kien N. Chuc, Sungjin Kim, Yanjie Wang |
2020-07-28 |
| 10612135 |
Method and system for high temperature clean |
Sanjeev Baluja, Kalyanjit Ghosh, Ren-Guan Duan, Gregory Siu, Praket P. Jha +4 more |
2020-04-07 |
| 10600624 |
System and method for substrate processing chambers |
Kalyanjit Ghosh, Sanjeev Baluja, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou +9 more |
2020-03-24 |
| 10490436 |
Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films |
Kalyanjit Ghosh, Sanjeev Baluja, Praket P. Jha, Krishna Nittala |
2019-11-26 |
| 10483282 |
VNAND tensile thick TEOS oxide |
Michael Wenyoung Tsiang, Praket P. Jha, Xinhai Han, Bok Hoen Kim, Sang Hyuk Kim +8 more |
2019-11-19 |
| 10312076 |
Application of bottom purge to increase clean efficiency |
Kalyanjit Ghosh, Sanjeev Baluja |
2019-06-04 |
| 10242890 |
Substrate support with heater |
Leon Volfovski |
2019-03-26 |
| 10199388 |
VNAND tensile thick TEOS oxide |
Michael Wenyoung Tsiang, Praket P. Jha, Xinhai Han, Bok Hoen Kim, Sang Hyuk Kim +8 more |
2019-02-05 |
| 10113231 |
Process kit including flow isolator ring |
Dale R. DuBois, Kalyanjit Ghosh, Kien N. Chuc, Sanjeev Baluja, Yanjie Wang +1 more |
2018-10-30 |
| 10017855 |
Process kit for a high throughput processing chamber |
Kalyanjit Ghosh, Sanjeev Baluja, Kien N. Chuc, Sungjin Kim, Yanjie Wang |
2018-07-10 |
| 9706605 |
Substrate support with feedthrough structure |
Leon Volfovski |
2017-07-11 |
| 9538583 |
Substrate support with switchable multizone heater |
Leon Volfovski, Alex Minkovich, Michael R. Rice |
2017-01-03 |
