Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412741 | Silicon oxide gap fill using capacitively coupled plasmas | Deenesh Padhi, Hang Yu | 2025-09-09 |
| 12338530 | Shaped showerhead for edge plasma modulation | Saketh Pemmasani, Daemian Raj Benjamin Raj, Xiaopu Li, Akshay Dhanakshirur, Mayur Govind Kulkarni +2 more | 2025-06-24 |
| 11929278 | Low impedance current path for edge non-uniformity tuning | Saketh Pemmasani, Akshay Dhanakshirur, Mayur Govind Kulkarni, Hang Yu, Deenesh Padhi | 2024-03-12 |
| 11869795 | Mesa height modulation for thickness correction | Saketh Pemmasani, Akshay Dhanakshirur, Mayur Govind Kulkarni, Hang Yu, Deenesh Padhi | 2024-01-09 |
| 11817313 | Methods for pressure ramped plasma purge | Sanjay Kamath, Deenesh Padhi | 2023-11-14 |
| 11600468 | Multi channel splitter spool | Sanjay Kamath, Deenesh Padhi, Arkajit Roy Barman | 2023-03-07 |
| 11430654 | Initiation modulation for plasma deposition | Sanjay Kamath, Deenesh Padhi | 2022-08-30 |
| 11270903 | Multi zone electrostatic chuck | Sanjay Kamath, Deenesh Padhi | 2022-03-08 |
| 10566211 | Continuous and pulsed RF plasma for etching metals | Anand Chandrashekar | 2020-02-18 |