Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12338530 | Shaped showerhead for edge plasma modulation | Saketh Pemmasani, Daemian Raj Benjamin Raj, Akshay Dhanakshirur, Mayur Govind Kulkarni, Madhu Santosh Kumar Mutyala +2 more | 2025-06-24 |
| 12228534 | Capacitive sensor for monitoring gas concentration | Kallol Bera, Yaoling Pan, Kelvin Chan, Amir Bayati, Philip Allan Kraus +2 more | 2025-02-18 |
| 12224156 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Jozef Kudela, Kallol Bera, Tsutomu Tanaka, Dmitry A. Dzilno | 2025-02-11 |
| 12061215 | RF measurement from a transmission line sensor | David J. Coumou, Michelle SanPedro | 2024-08-13 |
| 11959868 | Capacitive sensor for monitoring gas concentration | Kallol Bera, Yaoling Pan, Kelvin Chan, Amir Bayati, Philip Allan Kraus +2 more | 2024-04-16 |
| 11908662 | Device and method for tuning plasma distribution using phase control | Kallol Bera, Edward P. Hammond, IV, Jonghoon Baek, Amit Kumar BANSAL, Jun Ma +1 more | 2024-02-20 |
| 11823871 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Jozef Kudela, Tsutomu Tanaka, Alexander V. Garachtchenko, Dmitry A. Dzilno, Avinash Shervegar +3 more | 2023-11-21 |
| 11581206 | Capacitive sensor for chamber condition monitoring | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Jennifer Y. Sun, Philip Allan Kraus +6 more | 2023-02-14 |