Shaped showerhead for edge plasma modulation

Assignee

• Applied Materials

Inventors

• Saketh Pemmasani (3 patents)
• Daemian Raj Benjamin Raj (16 patents)
• Xiaopu Li (8 patents)
• Akshay Dhanakshirur (6 patents)
• Mayur Govind Kulkarni (20 patents)
• Madhu Santosh Kumar Mutyala (9 patents)
• Deenesh Padhi (94 patents)
• Hang Yu (35 patents)

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