Capacitive sensor for monitoring gas concentration

Assignee

• Applied Materials

Inventors

• Xiaopu Li (8 patents)
• Kallol Bera (78 patents)
• Yaoling Pan (38 patents)
• Kelvin Chan (72 patents)
• Amir Bayati (18 patents)
• Philip Allan Kraus (114 patents)
• Kenric Choi (22 patents)
• William J. Durand (11 patents)

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