Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368024 | Methods and apparatus for processing a substrate | Abdullah Zafar, William J. Durand, Xinyuan Chong, Weize Hu, Kelvin Chan +4 more | 2025-07-22 |
| 12228534 | Capacitive sensor for monitoring gas concentration | Xiaopu Li, Kallol Bera, Yaoling Pan, Kelvin Chan, Amir Bayati +2 more | 2025-02-18 |
| 12084771 | Control of liquid delivery in auto-refill systems | Zohreh Razavi Hesabi, Cong Trinh, Kevin Griffin, Alexander V. Garachtchenko, Vipin Jose +3 more | 2024-09-10 |
| 11959868 | Capacitive sensor for monitoring gas concentration | Xiaopu Li, Kallol Bera, Yaoling Pan, Kelvin Chan, Amir Bayati +2 more | 2024-04-16 |
| 11753715 | Apparatus and methods for controlling concentration of precursors to processing chamber | William J. Durand | 2023-09-12 |
| 11628456 | Apparatus for increasing flux from an ampoule | Xiaoxiong Yuan, Daping Yao, Mei Chang | 2023-04-18 |
| 11566327 | Methods and apparatus to reduce pressure fluctuations in an ampoule of a chemical delivery system | Ilker Durukan, Muhammad M. Rasheed, Tatsuya Sato | 2023-01-31 |
| 11156494 | Continuous liquid level measurement detector for closed metal containers | Oleg V. Serebryanov, Alexander Goldin | 2021-10-26 |
| 11059061 | Apparatus for increasing flux from an ampoule | Xiaoxiong Yuan, Daping Yao, Mei Chang | 2021-07-13 |
| 10752990 | Apparatus and methods to remove residual precursor inside gas lines post-deposition | Daping Yao, Xiaoxiong Yuan, Jiang Lu, Can Xu, Paul F. Ma +1 more | 2020-08-25 |
| 9856561 | Auto-refill ampoule and methods of use | Joseph Yudovsky | 2018-01-02 |
| 9766022 | Gas heater | Tao Hou, Son T. Nguyen, Anh N. Nguyen | 2017-09-19 |
| 9644267 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Ronald Stevens, James D. Felsch, Jacob Grayson +4 more | 2017-05-09 |
| 9347696 | Compact ampoule thermal management system | David K. Carlson, Errol Antonio C. Sanchez, Marcel E. Josephson, Dennis L. Demars | 2016-05-24 |
| 9279604 | Compact ampoule thermal management system | David K. Carlson, Errol Antonio C. Sanchez, Marcel E. Josephson, Dennis L. Demars, Emre Cuvalci +1 more | 2016-03-08 |
| 8481118 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Ronald Stevens, James D. Felsch, Jacob Grayson +4 more | 2013-07-09 |
| 8343279 | Apparatuses for atomic layer deposition | Nyi O. Myo, Shreyas Kher, Pravin K. Narwankar, Steve Poppe, Craig Metzner +1 more | 2013-01-01 |
| 8309874 | Gas heater | Tao Hou, Son T. Nguyen, Anh N. Nguyen | 2012-11-13 |
| 8137468 | Heated valve manifold for ampoule | Son T. Nguyen | 2012-03-20 |
| 7976631 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Ronald Stevens, James D. Felsch, Jacob Grayson +4 more | 2011-07-12 |
| 7794544 | Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system | Son T. Nguyen, Kedarnath Sangam, Miriam Schwartz, Sanjay Bhat, Pravin K. Narwankar +4 more | 2010-09-14 |
| 7775508 | Ampoule for liquid draw and vapor draw with a continuous level sensor | Pravin K. Narwankar, Shreyas Kher, Son T. Nguyen, Paul Deaton, Khai Ngo +3 more | 2010-08-17 |