Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8968473 | Stackable multi-port gas nozzles | Yan Rozenzon, Peijun Ding | 2015-03-03 |
| 8845809 | Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition | Yan Rozenzon, David Z. Chen, Xiaole Yan, Peijun Ding, Zheng Xu | 2014-09-30 |
| 8652259 | Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition | Yan Rozenzon, David Z. Chen, Xiaole Yan, Peijun Ding, Zheng Xu | 2014-02-18 |
| 8343279 | Apparatuses for atomic layer deposition | Nyi O. Myo, Kenric Choi, Shreyas Kher, Pravin K. Narwankar, Craig Metzner +1 more | 2013-01-01 |
| 8282992 | Methods for atomic layer deposition of hafnium-containing high-K dielectric materials | Nyi O. Myo, Kenric Cho, Shreyas Kher, Pravin K. Narwankar, Craig Metzner +1 more | 2012-10-09 |