Issued Patents All Time
Showing 25 most recent of 103 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424363 | Magnetic thin film laminated structure and micro-inductive device thereof | Yujie Yang, Tongwen Zhang, Wei Xia, Hougong Wang | 2025-09-23 |
| 11699541 | Magnetic thin film laminated structure deposition method | Yujie Yang, Tongwen Zhang, Wei Xia, Hougong Wang | 2023-07-11 |
| 11328940 | Degassing chamber and semiconductor processing apparatus | Qiang Jia, Mengxin Zhao, Hougong Wang | 2022-05-10 |
| 11107699 | Semiconductor manufacturing process | Bo Zheng, Zhenguo Ma, Chun Wang, Jing Shi, Xin Wu +1 more | 2021-08-31 |
| 10984993 | Plasma processing apparatus | Peng-Yang Chen, Mengxin Zhao, Gang Wei, Liang Zhang, Bai Yang +1 more | 2021-04-20 |
| 10886142 | Annealing method, process chamber and annealing apparatus | Zhimin BAI, Qiang Li, Bin Deng, Yuchun Deng, Hougong Wang | 2021-01-05 |
| 10622145 | Magnetic thin film deposition chamber and thin film deposition apparatus | Yujie Yang, Tongwen Zhang, Wei Xia, Hougong Wang | 2020-04-14 |
| 10622224 | Precleaning chamber and plasma processing apparatus | Qing SHE, Peng-Yang Chen, Mengxin Zhao, Kui Xu, Guodong Bian | 2020-04-14 |
| 10381202 | Magnetron and magnetron sputtering device | Yujie Yang, Qiang Li, Guoqing Qiu, Zhimin BAI, Hougong Wang +1 more | 2019-08-13 |
| 10347470 | Process chamber and semiconductor processing apparatus | Feng Lv, Fenggang Zhang, Mengxin Zhao | 2019-07-09 |
| 10287686 | Hot plate and substrate processing equipment using the same | Mengxin Zhao, Xu Liu, Hougong Wang, Wei Xia, Lihui Wen | 2019-05-14 |
| 10047430 | Self-ionized and inductively-coupled plasma for sputtering and resputtering | Rong Tao, Zheng Xu, Daniel C. Lubben, Suraj Rengarajan, Michael Miller +7 more | 2018-08-14 |
| 9991157 | Method for depositing a diffusion barrier layer and a metal conductive layer | Tony P. Chiang, Gongda Yao, Fusen Chen, Barry Chin, Gene Y. Kohara +2 more | 2018-06-05 |
| 9537032 | Low-cost high-efficiency solar module using epitaxial Si thin-film absorber and double-sided heterojunction solar cell with integrated module fabrication | Jiunn Benjamin Heng, Chentao Yu, Zheng Xu, Jianming Fu | 2017-01-03 |
| 9390970 | Method for depositing a diffusion barrier layer and a metal conductive layer | Tony P. Chiang, Gongda Yao, Fusen Chen, Barry Chin, Gene Y. Kohara +2 more | 2016-07-12 |
| 8968473 | Stackable multi-port gas nozzles | Steve Poppe, Yan Rozenzon | 2015-03-03 |
| 8845809 | Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition | Steve Poppe, Yan Rozenzon, David Z. Chen, Xiaole Yan, Zheng Xu | 2014-09-30 |
| 8696875 | Self-ionized and inductively-coupled plasma for sputtering and resputtering | Rong Tao, Zheng Xu, Daniel C. Lubben, Suraj Rengarajan, Michael Miller +7 more | 2014-04-15 |
| 8668816 | Self-ionized and inductively-coupled plasma for sputtering and resputtering | Rong Tao, Zheng Xu, Daniel C. Lubben, Suraj Rengarajan, Michael Miller +7 more | 2014-03-11 |
| 8652259 | Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition | Steve Poppe, Yan Rozenzon, David Z. Chen, Xiaole Yan, Zheng Xu | 2014-02-18 |
| 8637761 | Solar cells fabricated by using CVD epitaxial Si films on metallurgical-grade Si wafers | Jianming Fu, Zheng Xu, Chentao Yu, Guanghua Song, Jianjun Liang | 2014-01-28 |
| 8500963 | Sputtering of thermally resistive materials including metal chalcogenides | Mengqi Ye, Keith A. Miller, Goichi Yoshidome, Rong Tao | 2013-08-06 |
| 8460519 | Protective offset sputtering | Mengqi Ye, Zhendong Liu | 2013-06-11 |
| 8454804 | Protective offset sputtering | Mengqi Ye, Zhendong Liu | 2013-06-04 |
| 8158511 | Method of depositing a uniform barrier layer and metal seed layer with reduced overhang over a plurality of recessed semiconductor features | Tony P. Chiang, Gongda Yao, Fusen Chen, Barry Chin, Gene Y. Kohara +2 more | 2012-04-17 |