Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431376 | Semiconductor process chamber, semiconductor process equipment, and semiconductor process method | Yongfei WANG, Yunfeng LAN | 2025-09-30 |
| 12278123 | Semiconductor processing apparatus | Jingfeng WEI | 2025-04-15 |
| 11282682 | Magnetron drive mechanism, magnetron assembly and reaction chamber | Jingfeng WEI, Mengxin Zhao, Jue Hou | 2022-03-22 |
| 10622224 | Precleaning chamber and plasma processing apparatus | Peng-Yang Chen, Mengxin Zhao, Peijun Ding, Kui Xu, Guodong Bian | 2020-04-14 |
| 9978570 | Reaction chamber and semi-conductor processing device | Yanzhao Zhang, Peng-Yang Chen | 2018-05-22 |