Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278096 | Shield cooling assembly, reaction chamber and semiconductor processing apparatus | Qing Chang, Bing Li | 2025-04-15 |
| 11952653 | Sputtering reaction chamber and process assembly of sputtering reaction chamber | Liren Han, Bing Li, Keke Zhao, Lixin Pei | 2024-04-09 |
| 10622224 | Precleaning chamber and plasma processing apparatus | Qing SHE, Peng-Yang Chen, Mengxin Zhao, Peijun Ding, Kui Xu | 2020-04-14 |