Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12252776 | Carrying device and semiconductor processing apparatus | Qing Chang, Bing Li | 2025-03-18 |
| 11328940 | Degassing chamber and semiconductor processing apparatus | Qiang Jia, Peijun Ding, Hougong Wang | 2022-05-10 |
| 11282682 | Magnetron drive mechanism, magnetron assembly and reaction chamber | Qing SHE, Jingfeng WEI, Jue Hou | 2022-03-22 |
| 11282735 | Electrostatic chuck and semiconductor equipment | Quanyu Shi, Shuaitao SHI, Jinrong Zhao | 2022-03-22 |
| 11107665 | Feeding structure, upper electrode assembly, and physical vapor deposition chamber and device | Yuchun Deng, Chao Zhang, Peng-Yang Chen, Guoqing Qiu | 2021-08-31 |
| 10984993 | Plasma processing apparatus | Peng-Yang Chen, Gang Wei, Liang Zhang, Bai Yang, Guilong Wu +1 more | 2021-04-20 |
| 10622224 | Precleaning chamber and plasma processing apparatus | Qing SHE, Peng-Yang Chen, Peijun Ding, Kui Xu, Guodong Bian | 2020-04-14 |
| 10347470 | Process chamber and semiconductor processing apparatus | Feng Lv, Fenggang Zhang, Peijun Ding | 2019-07-09 |
| 10287686 | Hot plate and substrate processing equipment using the same | Xu Liu, Peijun Ding, Hougong Wang, Wei Xia, Lihui Wen | 2019-05-14 |
| 10273572 | Heating chamber and semiconductor processing apparatus | Qiang Jia | 2019-04-30 |