Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107665 | Feeding structure, upper electrode assembly, and physical vapor deposition chamber and device | Chao Zhang, Peng-Yang Chen, Guoqing Qiu, Mengxin Zhao | 2021-08-31 |
| 10886142 | Annealing method, process chamber and annealing apparatus | Zhimin BAI, Qiang Li, Bin Deng, Hougong Wang, Peijun Ding | 2021-01-05 |