Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107665 | Feeding structure, upper electrode assembly, and physical vapor deposition chamber and device | Yuchun Deng, Chao Zhang, Peng-Yang Chen, Mengxin Zhao | 2021-08-31 |
| 10381202 | Magnetron and magnetron sputtering device | Yujie Yang, Qiang Li, Zhimin BAI, Hougong Wang, Peijun Ding +1 more | 2019-08-13 |
| 9399817 | Magnetron source, magnetron sputtering apparatus and magnetron sputtering method | Yangchao Li, Bo Geng, Xuewei Wu, Xu Liu | 2016-07-26 |