Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278123 | Semiconductor processing apparatus | Qing SHE | 2025-04-15 |
| 12264393 | Semiconductor processing apparatus and mixing inlet device | Lei Zhu, Hong Ji, Keke Zhao | 2025-04-01 |
| 11282682 | Magnetron drive mechanism, magnetron assembly and reaction chamber | Qing SHE, Mengxin Zhao, Jue Hou | 2022-03-22 |