Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107706 | Gas phase etching device and gas phase etching apparatus | Jun Zhang, Zhenguo Ma, Xin Wu, Yunlong Hu, Henan Zhang +1 more | 2021-08-31 |
| 10287686 | Hot plate and substrate processing equipment using the same | Mengxin Zhao, Xu Liu, Peijun Ding, Hougong Wang, Wei Xia | 2019-05-14 |