| 10047430 |
Self-ionized and inductively-coupled plasma for sputtering and resputtering |
Peijun Ding, Rong Tao, Zheng Xu, Suraj Rengarajan, Michael Miller +7 more |
2018-08-14 |
| 8764949 |
Prediction and compensation of erosion in a magnetron sputtering target |
Keith A. Miller |
2014-07-01 |
| 8696875 |
Self-ionized and inductively-coupled plasma for sputtering and resputtering |
Peijun Ding, Rong Tao, Zheng Xu, Suraj Rengarajan, Michael Miller +7 more |
2014-04-15 |
| 8668816 |
Self-ionized and inductively-coupled plasma for sputtering and resputtering |
Peijun Ding, Rong Tao, Zheng Xu, Suraj Rengarajan, Michael Miller +7 more |
2014-03-11 |
| 8518220 |
Method for predicting and compensating erosion in a magnetron sputtering target |
Keith A. Miller |
2013-08-27 |
| 8133360 |
Prediction and compensation of erosion in a magnetron sputtering target |
Keith A. Miller |
2012-03-13 |
| 7807030 |
Small scanned magentron |
Ilyoung Richard Hong, James Tsung, Peijun Ding, Nirmalya Maity |
2010-10-05 |
| 7674360 |
Mechanism for varying the spacing between sputter magnetron and target |
Ilyoung Richard Hong, Donny Young, Michael Rosenstein, Robert B. Lowrance, Michael Miller +3 more |
2010-03-09 |
| 7169271 |
Magnetron executing planetary motion adjacent a sputtering target |
Ilyoung Richard Hong, James Tsung, Peijun Ding, Nirmalya Maity |
2007-01-30 |
| 6852202 |
Small epicyclic magnetron with controlled radial sputtering profile |
Michael Miller, James Tsung, Ilyoung Richard Hong, Peijun Ding |
2005-02-08 |
| 6841050 |
Small planetary magnetron |
Ilyoung Richard Hong, James Tsung, Peijun Ding, Nirmalya Maity |
2005-01-11 |
