Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10047430 | Self-ionized and inductively-coupled plasma for sputtering and resputtering | Peijun Ding, Rong Tao, Zheng Xu, Suraj Rengarajan, Michael Miller +7 more | 2018-08-14 |
| 8764949 | Prediction and compensation of erosion in a magnetron sputtering target | Keith A. Miller | 2014-07-01 |
| 8696875 | Self-ionized and inductively-coupled plasma for sputtering and resputtering | Peijun Ding, Rong Tao, Zheng Xu, Suraj Rengarajan, Michael Miller +7 more | 2014-04-15 |
| 8668816 | Self-ionized and inductively-coupled plasma for sputtering and resputtering | Peijun Ding, Rong Tao, Zheng Xu, Suraj Rengarajan, Michael Miller +7 more | 2014-03-11 |
| 8518220 | Method for predicting and compensating erosion in a magnetron sputtering target | Keith A. Miller | 2013-08-27 |
| 8133360 | Prediction and compensation of erosion in a magnetron sputtering target | Keith A. Miller | 2012-03-13 |
| 7807030 | Small scanned magentron | Ilyoung Richard Hong, James Tsung, Peijun Ding, Nirmalya Maity | 2010-10-05 |
| 7674360 | Mechanism for varying the spacing between sputter magnetron and target | Ilyoung Richard Hong, Donny Young, Michael Rosenstein, Robert B. Lowrance, Michael Miller +3 more | 2010-03-09 |
| 7169271 | Magnetron executing planetary motion adjacent a sputtering target | Ilyoung Richard Hong, James Tsung, Peijun Ding, Nirmalya Maity | 2007-01-30 |
| 6852202 | Small epicyclic magnetron with controlled radial sputtering profile | Michael Miller, James Tsung, Ilyoung Richard Hong, Peijun Ding | 2005-02-08 |
| 6841050 | Small planetary magnetron | Ilyoung Richard Hong, James Tsung, Peijun Ding, Nirmalya Maity | 2005-01-11 |