| 11123837 |
Method of removal of sharp corners from diffuser plate |
Lai ZHAO, Jianhua Zhou, Robin L. Tiner, Gaku Furuta, Shinichi Kurita +1 more |
2021-09-21 |
$69,558,000 |
| 7807030 |
Small scanned magentron |
James Tsung, Daniel C. Lubben, Peijun Ding, Nirmalya Maity |
2010-10-05 |
$8,418,000 |
| 7767064 |
Position controlled dual magnetron |
Cristopher M. Pavloff, Winsor Lam, Tza-Jing Gung, Hong Yang |
2010-08-03 |
$9,713,000 |
| 7674360 |
Mechanism for varying the spacing between sputter magnetron and target |
Donny Young, Michael Rosenstein, Robert B. Lowrance, Daniel C. Lubben, Michael Miller +3 more |
2010-03-09 |
$8,227,000 |
| 7169271 |
Magnetron executing planetary motion adjacent a sputtering target |
James Tsung, Daniel C. Lubben, Peijun Ding, Nirmalya Maity |
2007-01-30 |
$23,548,000 |
| 6852202 |
Small epicyclic magnetron with controlled radial sputtering profile |
Michael Miller, James Tsung, Daniel C. Lubben, Peijun Ding |
2005-02-08 |
$20,730,000 |
| 6841050 |
Small planetary magnetron |
James Tsung, Daniel C. Lubben, Peijun Ding, Nirmalya Maity |
2005-01-11 |
$26,821,000 |
| 6235163 |
Methods and apparatus for ionized metal plasma copper deposition with enhanced in-film particle performance |
Darryl Angelo, Arvind Sundarrajan, Peijun Ding, James Tsung, Barry Chin |
2001-05-22 |
$114,795,000 |
