Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11123837 | Method of removal of sharp corners from diffuser plate | Lai ZHAO, Jianhua Zhou, Robin L. Tiner, Gaku Furuta, Shinichi Kurita +1 more | 2021-09-21 |
| 7807030 | Small scanned magentron | James Tsung, Daniel C. Lubben, Peijun Ding, Nirmalya Maity | 2010-10-05 |
| 7767064 | Position controlled dual magnetron | Cristopher M. Pavloff, Winsor Lam, Tza-Jing Gung, Hong Yang | 2010-08-03 |
| 7674360 | Mechanism for varying the spacing between sputter magnetron and target | Donny Young, Michael Rosenstein, Robert B. Lowrance, Daniel C. Lubben, Michael Miller +3 more | 2010-03-09 |
| 7169271 | Magnetron executing planetary motion adjacent a sputtering target | James Tsung, Daniel C. Lubben, Peijun Ding, Nirmalya Maity | 2007-01-30 |
| 6852202 | Small epicyclic magnetron with controlled radial sputtering profile | Michael Miller, James Tsung, Daniel C. Lubben, Peijun Ding | 2005-02-08 |
| 6841050 | Small planetary magnetron | James Tsung, Daniel C. Lubben, Peijun Ding, Nirmalya Maity | 2005-01-11 |
| 6235163 | Methods and apparatus for ionized metal plasma copper deposition with enhanced in-film particle performance | Darryl Angelo, Arvind Sundarrajan, Peijun Ding, James Tsung, Barry Chin | 2001-05-22 |