Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136538 | Deposition chamber system diffuser with increased power efficiency | Changling Li, Lai ZHAO, Soo Young Choi, Robin L. Tiner, David Atchley +1 more | 2024-11-05 |
| 11123837 | Method of removal of sharp corners from diffuser plate | Ilyoung Richard Hong, Lai ZHAO, Jianhua Zhou, Robin L. Tiner, Shinichi Kurita +1 more | 2021-09-21 |
| 10923327 | Chamber liner | Jianheng Li, Lai ZHAO, Robin L. Tiner, Allen Lau, Soo Young Choi | 2021-02-16 |
| 10697063 | Corner spoiler for improving profile uniformity | Lai ZHAO, Qunhua Wang, Robin L. Tiner, Beom Soo Park, Soo Young Choi +1 more | 2020-06-30 |
| 10676817 | Flip edge shadow frame | Qunhua Wang, Soo Young Choi, Robin L. Tiner, John M. White, Beom Soo Park | 2020-06-09 |
| 10468221 | Shadow frame with sides having a varied profile for improved deposition uniformity | Soo Young Choi, Yi Cui, Robin L. Tiner, Jinhyun CHO, Jiarui Wang +1 more | 2019-11-05 |
| 10123379 | Substrate support with quadrants | Robin L. Tiner, Soo Young Choi, Beom Soo Park, Shinichi Kurita, Bora Oh | 2018-11-06 |
| 10002711 | Low temperature multilayer dielectric film for passivation and capacitor | Dapeng Wang, Yixuan Wu, Tae Kyung Won, Beom Soo Park | 2018-06-19 |
| 9827578 | Tightly fitted ceramic insulator on large area electrode | Jozef Kudela, Jonghoon Baek, John M. White, Robin L. Tiner, Suhail Anwar | 2017-11-28 |
| 9758869 | Anodized showerhead | Soo Young Choi, Suhail Anwar, Beom Soo Park, Robin L. Tiner, John M. White +1 more | 2017-09-12 |
| 9677177 | Substrate support with quadrants | Robin L. Tiner, Soo Young Choi, Beom Soo Park, Shinichi Kurita, Bora Oh | 2017-06-13 |
| 9382621 | Ground return for plasma processes | Soo Young Choi, Robin L. Tiner, Shinichi Kurita, John M. White, Carl A. Sorensen +3 more | 2016-07-05 |
| 9299558 | Run-to-run stability of film deposition | Lai ZHAO, Qunhua Wang, Soo Young Choi | 2016-03-29 |
| 9243328 | Susceptor with roll-formed surface and method for making same | David Atchley, Soo Young Choi, John M. White | 2016-01-26 |
| 9230796 | A-Si seasoning effect to improve SiN run-to-run uniformity | Soo Young Choi, Beom Soo Park, Young Jin Choi, Omori Kenji | 2016-01-05 |
| 9187827 | Substrate support with ceramic insulation | John M. White, Shinichi Kurita, Soo Young Choi, Suhail Anwar, Robin L. Tiner | 2015-11-17 |
| 9068262 | Tightly fitted ceramic insulator on large area electrode | Jozef Kudela, Jonghoon Baek, John M. White, Robin L. Tiner, Suhail Anwar | 2015-06-30 |
| 8999847 | a-Si seasoning effect to improve SiN run-to-run uniformity | Soo Young Choi, Beom Soo Park, Young Jin Choi, Omori Kenji | 2015-04-07 |
| D717113 | Susceptor with heater | John M. White, Robin L. Tiner, Suhail Anwar, Soo Young Choi | 2014-11-11 |
| 8877301 | Plasma processing including asymmetrically grounding a susceptor | Soo Young Choi, Young Jin Choi | 2014-11-04 |
| D716098 | Susceptor with heater | John M. White, Robin L. Tiner, Suhail Anwar, Soo Young Choi, Shinichi Kurita | 2014-10-28 |
| D713200 | Susceptor with heater | John M. White, Robin L. Tiner, Suhail Anwar, Soo Young Choi | 2014-09-16 |
| D680946 | Gas flow diffuser faceplate | Suhail Anwar, John M. White, Soo Young Choi, Shinichi Kurita, Carl Sorenson +1 more | 2013-04-30 |
| 8299466 | Thin film transistors having multiple doped silicon layers | Soo Young Choi, Omori Kenji | 2012-10-30 |
| D669032 | Flow blocking shadow frame support | Suhail Anwar, John M. White, Soo Young Choi, Shinichi Kurita, Carl Sorenson +1 more | 2012-10-16 |