Issued Patents All Time
Showing 25 most recent of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140168 | Flat head units for heavy load alignment | Hassan Yousefi, Ganesh CHANDRASEKARAN, Jianhua Zhou, Isami Iguchi | 2024-11-12 |
| 12136538 | Deposition chamber system diffuser with increased power efficiency | Changling Li, Lai ZHAO, Gaku Furuta, Soo Young Choi, David Atchley +1 more | 2024-11-05 |
| 11773489 | Gas confiner assembly for eliminating shadow frame | Lai ZHAO, Qunhua Wang, Soo Young Choi, Beom Soo Park | 2023-10-03 |
| 11123837 | Method of removal of sharp corners from diffuser plate | Ilyoung Richard Hong, Lai ZHAO, Jianhua Zhou, Gaku Furuta, Shinichi Kurita +1 more | 2021-09-21 |
| 10927461 | Gas diffuser support structure for reduced particle generation | Allen Lau, Lai ZHAO, Soo Young Choi | 2021-02-23 |
| 10923327 | Chamber liner | Jianheng Li, Lai ZHAO, Allen Lau, Gaku Furuta, Soo Young Choi | 2021-02-16 |
| 10883174 | Gas diffuser mounting plate for reduced particle generation | Allen Lau, Hsiang AN, Lai ZHAO, Jianhua Zhou | 2021-01-05 |
| 10697063 | Corner spoiler for improving profile uniformity | Lai ZHAO, Gaku Furuta, Qunhua Wang, Beom Soo Park, Soo Young Choi +1 more | 2020-06-30 |
| 10676817 | Flip edge shadow frame | Qunhua Wang, Soo Young Choi, John M. White, Gaku Furuta, Beom Soo Park | 2020-06-09 |
| 10487401 | Diffuser temperature control | Shinichi Kurita | 2019-11-26 |
| 10468221 | Shadow frame with sides having a varied profile for improved deposition uniformity | Gaku Furuta, Soo Young Choi, Yi Cui, Jinhyun CHO, Jiarui Wang +1 more | 2019-11-05 |
| 10373809 | Grooved backing plate for standing wave compensation | Shinichi Kurita | 2019-08-06 |
| 10312058 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2019-06-04 |
| 10280510 | Substrate support assembly with non-uniform gas flow clearance | Shinichi Kurita | 2019-05-07 |
| 10262837 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2019-04-16 |
| 10123379 | Substrate support with quadrants | Soo Young Choi, Beom Soo Park, Shinichi Kurita, Bora Oh, Gaku Furuta | 2018-11-06 |
| 10087524 | Showerhead support structure for improved gas flow | Soo Young Choi, Qunhua Wang, Jrjyan Jerry CHEN | 2018-10-02 |
| 9827578 | Tightly fitted ceramic insulator on large area electrode | Jozef Kudela, Jonghoon Baek, John M. White, Suhail Anwar, Gaku Furuta | 2017-11-28 |
| 9822449 | Showerhead support structures | Allen Lau | 2017-11-21 |
| 9758869 | Anodized showerhead | Soo Young Choi, Suhail Anwar, Gaku Furuta, Beom Soo Park, John M. White +1 more | 2017-09-12 |
| 9677177 | Substrate support with quadrants | Soo Young Choi, Beom Soo Park, Shinichi Kurita, Bora Oh, Gaku Furuta | 2017-06-13 |
| D784276 | Susceptor assembly | Shinichi Kurita | 2017-04-18 |
| 9580804 | Diffuser support | John M. White, Yeh Kurt Chang | 2017-02-28 |
| 9458538 | Method and apparatus for sealing an opening of a processing chamber | Shinichi Kurita, Takayuki Matsumoto, John M. White, Suhail Anwar | 2016-10-04 |
| 9382621 | Ground return for plasma processes | Soo Young Choi, Shinichi Kurita, John M. White, Carl A. Sorensen, Jeffrey A. Kho +3 more | 2016-07-05 |