Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11306393 | Methods and apparatus for ALD processes | Chien-Teh Kao, Jianhua Zhou | 2022-04-19 |
| 10697062 | Gas flow guide design for uniform flow distribution and efficient purge | Chien-Teh Kao, Xiangxin Rui, Jianhua Zhou, Shinichi Kurita, ShouQian Shao +1 more | 2020-06-30 |
| 9752703 | Methods and apparatus to reduce shock in a slit valve door | — | 2017-09-05 |
| 9382621 | Ground return for plasma processes | Soo Young Choi, Robin L. Tiner, Shinichi Kurita, John M. White, Carl A. Sorensen +3 more | 2016-07-05 |
| D627625 | Shadow frame support | Suhail Anwar, John M. White, Robin L. Tiner | 2010-11-23 |