Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394595 | Multi-antenna unit for large area inductively coupled plasma processing apparatus | Tae Kyung Won, Chien-Teh Kao, Jianhua Zhou | 2025-08-19 |
| 12080516 | High density plasma enhanced process chamber | Zheng John Ye, Jianhua Zhou, Suhail Anwar | 2024-09-03 |
| 11967516 | Substrate support for chucking of mask for deposition processes | Jrjyan Jerry CHEN, Sanjay Yadav, Tae Kyung Won, Jun Li, Surendra Kanimihally Setty | 2024-04-23 |
| 11929236 | Methods of tuning to improve plasma stability | Jianhua Zhou, Tae Kyung Won | 2024-03-12 |
| 10697062 | Gas flow guide design for uniform flow distribution and efficient purge | Chien-Teh Kao, Jeffrey A. Kho, Xiangxin Rui, Jianhua Zhou, Shinichi Kurita +1 more | 2020-06-30 |
| 9330928 | Methods for selective etching of a multi-layer substrate | Jinhong Tong, Frederick Carlos Fulgenico | 2016-05-03 |
| 9175382 | High metal ionization sputter gun | Hong Sheng Yang, Tony P. Chiang, Kent Riley Child, Chi-I Lang | 2015-11-03 |
| 9023438 | Methods and apparatus for combinatorial PECVD or PEALD | Chi-I Lang, Jingang Su | 2015-05-05 |
| 8974649 | Combinatorial RF bias method for PVD | Kent Riley Child, James Tsung, Hong Sheng Yang | 2015-03-10 |
| 8925481 | Systems and methods for measuring, monitoring and controlling ozone concentration | Jay DeDontney, Jason Wright | 2015-01-06 |
| 8851010 | Systems and methods for measuring, monitoring and controlling ozone concentration | Jay DeDontney, Jason Wright | 2014-10-07 |
| 8821985 | Method and apparatus for high-K gate performance improvement and combinatorial processing | Chi-I Lang, Sandip Niyogi, Jinhong Tong | 2014-09-02 |
| 8733280 | Showerhead for processing chamber | Lipyeow Yap, Jay DeDontney, Jason Wright | 2014-05-27 |
| 8613863 | Methods for selective etching of a multi-layer substrate | Jinhong Tong, Frederick Carlos Fulgenico | 2013-12-24 |
| 7914603 | Particle trap for a plasma source | Ali Shajii, Xing Chen, Andrew Cowe, David M. Burtner, William Robert Entley | 2011-03-29 |
| 7501600 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | William M. Holber, Xing Chen, Andrew Cowe, Matthew Besen, Ronald W. Collins, Jr. +1 more | 2009-03-10 |
| 6872909 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | William M. Holber, Xing Chen, Andrew Cowe, Matthew Besen, Ronald W. Collins, Jr. +1 more | 2005-03-29 |
| 6437290 | Heat treatment apparatus having a thin light-transmitting window | Yicheng Li, Takashi Shigeoka, Takeshi Sakuma | 2002-08-20 |